17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest
Latest Publications

TOTAL DOCUMENTS

225

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H-INDEX

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Published By IEEE

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Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Highly symmetric tri-axis piezoelectric bimorph accelerometer

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest ◽

10.1109/mems.2004.1290556 ◽

2004 ◽

Author(s):

Qiang Zou ◽

Wei Tan ◽

Eun Sok Kim ◽

G.E. Loeb

Keyword(s):

Piezoelectric Bimorph

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Path-invariant fiber-based interferometric scanners for OCT

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest ◽

10.1109/mems.2004.1290527 ◽

2004 ◽

Author(s):

Bowen Cheng ◽

Jing-Yi Huang ◽

Ting-Ta Yen ◽

Yuan-Peng Huang ◽

J.A. Yeh

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RF MEMS tunable capacitors with large tuning ratio

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest ◽

10.1109/mems.2004.1290700 ◽

2004 ◽

Cited By ~ 21

Author(s):

T.G.S.M. Rijks ◽

J.T.M. van Beek ◽

P.G. Steeneken ◽

M.J.E. Ulenaers ◽

J. De Coster ◽

...

Keyword(s):

Rf Mems ◽

Tunable Capacitors ◽

Tuning Ratio

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A wireless microsensor for monitoring flow and pressure in a blood vessel utilizing a dual-inductor antenna stent and two pressure sensors

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest ◽

10.1109/mems.2004.1290561 ◽

2004 ◽

Cited By ~ 28

Author(s):

K. Takahata ◽

A. DeHennis ◽

K.D. Wise ◽

Y.B. Gianchandani

Keyword(s):

Blood Vessel ◽

Pressure Sensors

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Silicon liquid flow sensor encapsulation using metal to glass anodic bonding

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest ◽

10.1109/mems.2004.1290668 ◽

2004 ◽

Cited By ~ 3

Author(s):

D. Briand ◽

P. Weber ◽

N.F. de Rooij

Keyword(s):

Liquid Flow ◽

Flow Sensor ◽

Anodic Bonding

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Nano-to-micro self-assembly using shear flow devices

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest ◽

10.1109/mems.2004.1290612 ◽

2004 ◽

Author(s):

Chi-Yuan Shih ◽

Siyang Zheng ◽

E. Meng ◽

Yu-Chong Tai ◽

Yi Liu ◽

...

Keyword(s):

Shear Flow ◽

Self Assembly ◽

Flow Devices

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An AFM-based device for in-situ characterization of nano-wear

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest ◽

10.1109/mems.2004.1290552 ◽

2004 ◽

Author(s):

S. Deladi ◽

J.W. Berenschot ◽

M.J. de Boer ◽

G.J.M. Krijnen ◽

M.C. Elwenspoek

Keyword(s):

In Situ Characterization

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Magnetic composite electrodeposition of micro-array magnets for MEMS actuators

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest ◽

10.1109/mems.2004.1290670 ◽

2004 ◽

Author(s):

S. Guan ◽

B.J. Nelson

Keyword(s):

Magnetic Composite ◽

Mems Actuators ◽

Micro Array ◽

Composite Electrodeposition

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Parylene-pyrolyzed carbon for MEMS applications

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest ◽

10.1109/mems.2004.1290547 ◽

2004 ◽

Cited By ~ 1

Author(s):

M. Liger ◽

T.A. Harder ◽

Yu-Chong Tai ◽

S. Konishi

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A MEMS resonant strain sensor operated in air

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest ◽

10.1109/mems.2004.1290718 ◽

2004 ◽

Cited By ~ 49

Author(s):

K.E. Wojciechowski ◽

B.E. Boser ◽

A.P. Pisano

Keyword(s):

Strain Sensor

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17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical DigestLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Highly symmetric tri-axis piezoelectric bimorph accelerometer

Path-invariant fiber-based interferometric scanners for OCT

RF MEMS tunable capacitors with large tuning ratio

A wireless microsensor for monitoring flow and pressure in a blood vessel utilizing a dual-inductor antenna stent and two pressure sensors

Silicon liquid flow sensor encapsulation using metal to glass anodic bonding

Nano-to-micro self-assembly using shear flow devices

An AFM-based device for in-situ characterization of nano-wear

Magnetic composite electrodeposition of micro-array magnets for MEMS actuators

Parylene-pyrolyzed carbon for MEMS applications

A MEMS resonant strain sensor operated in air

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest
Latest Publications