Compact extreme ultraviolet reflectometer for the characterization of grazing incidence optics based on a gas discharge light source

2005 ◽  
Vol 76 (4) ◽  
pp. 043104 ◽  
Author(s):  
Klaus Bergmann ◽  
Oliver Rosier ◽  
Christof Metzmacher
2012 ◽  
Vol 101 (14) ◽  
pp. 141125 ◽  
Author(s):  
L. Meng ◽  
A.-C. Bourgaux ◽  
S. Bastiani-Ceccotti ◽  
O. Guilbaud ◽  
M. Pittman ◽  
...  

2015 ◽  
Vol 40 (12) ◽  
pp. 2818 ◽  
Author(s):  
Denis Rudolf ◽  
Jan Bußmann ◽  
Michal Odstrčil ◽  
Minjie Dong ◽  
Klaus Bergmann ◽  
...  

1992 ◽  
Author(s):  
Melville P. Ulmer ◽  
Rudy H. Haidle ◽  
Robert I. Altkorn ◽  
P. Georgopoulos ◽  
Brian G. Rodricks ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document