scholarly journals Characterization of Photoconductive Diamond Detectors - Candidate Vacuum Ultraviolet Radiation and Extreme Ultraviolet Radiation Light Source Detectors for Lithography -

2010 ◽  
pp. 357
Keyword(s):  
Ultraviolet Radiation ◽  
Light Source ◽  
Vacuum Ultraviolet ◽  
Extreme Ultraviolet ◽  
Vacuum Ultraviolet Radiation ◽  
Extreme Ultraviolet Radiation

Photoluminescence of diamond containing nitrogen vacancy defects as a sensor of temperature upon exposure to vacuum- and extreme-ultraviolet radiation

2020 ◽  
Vol 22 (46) ◽  
pp. 26982-26986
Author(s):  
Hsiao-Chi Lu ◽  
Jen-Iu Lo ◽  
Yu-Chain Peng ◽  
Bing-Ming Cheng
Keyword(s):  
Ultraviolet Radiation ◽  
Vacuum Ultraviolet ◽  
Extreme Ultraviolet ◽  
Wavelength Region ◽  
Nitrogen Vacancy ◽  
Vacancy Defects ◽  
Extreme Ultraviolet Radiation ◽  
Nitrogen Vacancies

Upon excitation with vacuum-ultraviolet (VUV) and extreme-ultraviolet (EUV) radiation, diamond with nitrogen vacancies (DNV) emits strong photoluminescence (PL) in the wavelength region of 550–800 nm.

Pulsed free jets: novel nonlinear media for generation of vacuum ultraviolet and extreme ultraviolet radiation

1984 ◽  
Vol 88 (20) ◽  
pp. 4459-4465 ◽  
Author(s):  
Charles T. Rettner ◽  
Ernesto E. Marinero ◽  
Richard N. Zare ◽  
Andrew H. Kung
Keyword(s):  
Ultraviolet Radiation ◽  
Vacuum Ultraviolet ◽  
Extreme Ultraviolet ◽  
Free Jets ◽  
Nonlinear Media ◽  
Extreme Ultraviolet Radiation

Three grating monochromator for the vacuum-ultraviolet radiation beamline at the Swiss Light Source

2010 ◽  
Vol 1 (MEDSI-6) ◽  
Author(s):  
U. Ellenberger ◽  
H. Kalt ◽  
P. Böhler ◽  
A. Schwarb ◽  
S. Sonderegger ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Light Source ◽  
Vacuum Ultraviolet ◽  
Fine Tuning ◽  
Mirror Plane ◽  
Optical Elements ◽  
Vacuum Ultraviolet Radiation ◽  
Swiss Light Source ◽  
Grating Monochromator

The beamline optics of the vacuum-ultraviolet radiation beamline installed on a bending magnet of the Swiss Light Source are to be upgraded. Supports for all three optical elements of the beamline optics (collimating mirror, plane grating monochromator and focusing mirror) have been re-designed to allow a more stable and improved fine tuning. The monochromator is composed of a set of three interchangeable gratings mounted on a rotatable platform. Each grating is framed in an optimized goniometer mount, designed and built in-house, which uses flexible elements for precise and reproducible adjustments. The roll and yaw of the gratings can be adjusted with microradian precision to minimize conical diffraction.

Etching of Polymers by Photo-Material Processing using an Excimer Lamp

1996 ◽  
Vol 451 ◽  
Author(s):  
Noritaka Takezoe ◽  
Atsushi Yokotani ◽  
Kou Kurosawa ◽  
Wataru Sasaki ◽  
Kunio Yoshida ◽  
...  
Keyword(s):  
Material Processing ◽  
Ultraviolet Radiation ◽  
Light Source ◽  
Vacuum Ultraviolet ◽  
Organic Materials ◽  
Etching Process ◽  
Excimer Lasers ◽  
Single Crystalline ◽  
Excimer Lamp ◽  
Vacuum Ultraviolet Radiation

ABSTRACTAn excimer lamp is a new light source which can produce shorter wavelength of vacuum ultraviolet radiation than conventional ArF excimer lasers. We have tried to use the excimer lamp for photo-etching of polymers such as polymethylmetacrylie and polyimidic resins. We have found that the etching process was including the chemical and the quantumn processes. We also applied this technique for etching of some single crystalline organic materials which were very important to opt-electronic applications.

Generation Of Coherent Extreme Ultraviolet And Vacuum Ultraviolet Radiation Using Pulsed Nozzles

1984 ◽  
Author(s):  
Charles T. Rettner ◽  
Ernesto E. Marinero ◽  
Richard N. Zare ◽  
Andrew H. Kung
Keyword(s):  
Ultraviolet Radiation ◽  
Vacuum Ultraviolet ◽  
Extreme Ultraviolet ◽  
Vacuum Ultraviolet Radiation

Mass spectrometer characterization of reactions in photoresists exposed to extreme ultraviolet radiation

2011 ◽  
Author(s):  
Chimaobi Mbanaso ◽  
Seth Kruger ◽  
Craig Higgins ◽  
Yashdeep Khopkar ◽  
Alin Antohe ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Mass Spectrometer ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Radiation
Sign in / Sign up

Export Citation Format

Share Document