Effect of neutral gas heating on the wave magnetic fields of a low pressure 13.56 MHz planar coil inductively coupled argon discharge

2014 ◽  
Vol 21 (4) ◽  
pp. 043510 ◽  
Author(s):  
Kanesh K. Jayapalan ◽  
Oi-Hoong Chin
Keyword(s):  
Magnetic Fields ◽  
Low Pressure ◽  
Inductively Coupled ◽  
Neutral Gas ◽  
Argon Discharge ◽  
Planar Coil ◽  
Gas Heating

Effect of neutral gas heating in argon radio frequency inductively coupled plasma

2014 ◽  
Vol 32 ◽  
pp. 1460320 ◽  
Author(s):  
O. H. Chin ◽  
K. K. Jayapalan ◽  
C. S. Wong
Keyword(s):  
Magnetic Field ◽  
Inductively Coupled Plasma ◽  
Reasonable Agreement ◽  
Inductively Coupled ◽  
Magnetic Field Profile ◽  
Neutral Gas ◽  
Planar Coil ◽  
Gas Heating ◽  
The Magnetic Field ◽  
Measured Magnetic Field

Heating of neutral gas in inductively coupled plasma (ICP) is known to result in neutral gas depletion. In this work, this effect is considered in the simulation of the magnetic field distribution of a 13.56 MHz planar coil ICP. Measured electron temperatures and densities at argon pressures of 0.03, 0.07 and 0.2 mbar were used in the simulation whilst neutral gas temperatures were heuristically fitted. The simulated results showed reasonable agreement with the measured magnetic field profile.

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