Rapid thermally annealed plasma deposited SiNx:H thin films: Application to metal–insulator–semiconductor structures with Si, In0.53Ga0.47As, and InP

I. Mártil; A. del Prado; E. San Andrés; G. González Dı́az; F. L. Martı́nez

doi:10.1063/1.1592625

Rapid thermally annealed plasma deposited SiNx:H thin films: Application to metal–insulator–semiconductor structures with Si, In0.53Ga0.47As, and InP

Journal of Applied Physics ◽

10.1063/1.1592625 ◽

2003 ◽

Vol 94 (4) ◽

pp. 2642-2653 ◽

Cited By ~ 10

Author(s):

I. Mártil ◽

A. del Prado ◽

E. San Andrés ◽

G. González Dı́az ◽

F. L. Martı́nez

Keyword(s):

Thin Films ◽

Metal Insulator ◽

Metal Insulator Semiconductor ◽

Semiconductor Structures

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Fabrication and characterization of metal/insulator/semiconductor structures based on TiO2 and TiO2/SiO2 thin films prepared by low-temperature arc vapor deposition

Electronic Materials Letters ◽

10.1007/s13391-013-3244-6 ◽

2014 ◽

Vol 10 (3) ◽

pp. 579-584 ◽

Cited By ~ 4

Author(s):

Kumar Shubham ◽

P. Chakrabarti

Keyword(s):

Thin Films ◽

Low Temperature ◽

Vapor Deposition ◽

Metal Insulator ◽

Metal Insulator Semiconductor ◽

Semiconductor Structures ◽

Fabrication And Characterization

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Characterization of metal–ferroelectric–metal–insulator–semiconductor structures using ferroelectric Al-doped HfO2 thin films prepared by atomic-layer deposition with different O3 doses

Japanese Journal of Applied Physics ◽

10.7567/1347-4065/ab2c62 ◽

2019 ◽

Vol 58 (7) ◽

pp. 070907 ◽

Cited By ~ 3

Author(s):

So-Yeong Na ◽

So-Jung Yoon ◽

Seung-Youl Kang ◽

Seung-Eon Moon ◽

Sung-Min Yoon

Keyword(s):

Thin Films ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Metal Insulator ◽

Metal Insulator Semiconductor ◽

Semiconductor Structures ◽

Layer Deposition

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Effect of Laser Irradlation on the Electrical Properties of Pb0.8Sn0.2Te Thin Films Using Metal-Insulator-Semiconductor Structures

10.1109/isaf.1986.201208 ◽

1986 ◽

Author(s):

A.L. Dawar ◽

C. Jagadish ◽

P.C. Mathur

Keyword(s):

Thin Films ◽

Electrical Properties ◽

Metal Insulator ◽

Metal Insulator Semiconductor ◽

Semiconductor Structures

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Field effect studies on metal-insulator-semiconductor structures of n-type copper indium telluride thin films

International Journal of Electronics ◽

10.1080/00207219208925560 ◽

1992 ◽

Vol 72 (1) ◽

pp. 111-118 ◽

Cited By ~ 1

Author(s):

ANIL KUMAR ◽

P. C. MATHUR ◽

A. L. DAWAR

Keyword(s):

Thin Films ◽

Field Effect ◽

Metal Insulator ◽

Metal Insulator Semiconductor ◽

Semiconductor Structures ◽

Copper Indium ◽

Indium Telluride

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Field effect studies on metal-insulator-semiconductor structures of laser annealedn-type Pb0.8Sn0.2Te epitaxial thin films

International Journal of Electronics ◽

10.1080/00207218708921022 ◽

1987 ◽

Vol 62 (5) ◽

pp. 691-705 ◽

Cited By ~ 1

Author(s):

A. L. DAWAR ◽

C. JAGADISH ◽

P. C. MATHUR

Keyword(s):

Thin Films ◽

Field Effect ◽

Epitaxial Thin Films ◽

Metal Insulator ◽

Metal Insulator Semiconductor ◽

Semiconductor Structures

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Influence of ultrashort pulses of electromagnetic radiation on parameters of metal-insulator-semiconductor structures

Semiconductors ◽

10.1134/1.1836058 ◽

2004 ◽

Vol 38 (12) ◽

pp. 1390-1393

Author(s):

V. A. Terekhov ◽

A. N. Man’ko ◽

E. N. Bormontov ◽

V. N. Levchenko ◽

S. Yu. Trebunskikh ◽

...

Keyword(s):

Electromagnetic Radiation ◽

Ultrashort Pulses ◽

Metal Insulator ◽

Metal Insulator Semiconductor ◽

Semiconductor Structures

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Electron trapping in metal-insulator-semiconductor structures on n-GaN with SiO2 and Si3N4 dielectrics

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1806439 ◽

2004 ◽

Vol 22 (6) ◽

pp. 2379-2383 ◽

Cited By ~ 24

Author(s):

Choelhwyi Bae ◽

Cristiano Krug ◽

Gerald Lucovsky

Keyword(s):

Electron Trapping ◽

Metal Insulator ◽

Metal Insulator Semiconductor ◽

Semiconductor Structures

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Role of the dielectric for the charging dynamics of the dielectric/barrier interface in AlGaN/GaN based metal-insulator-semiconductor structures under forward gate bias stress

Applied Physics Letters ◽

10.1063/1.4891532 ◽

2014 ◽

Vol 105 (3) ◽

pp. 033512 ◽

Cited By ~ 52

Author(s):

P. Lagger ◽

P. Steinschifter ◽

M. Reiner ◽

M. Stadtmüller ◽

G. Denifl ◽

...

Keyword(s):

Gate Bias ◽

Metal Insulator ◽

Dielectric Barrier ◽

Metal Insulator Semiconductor ◽

Bias Stress ◽

Semiconductor Structures ◽

Charging Dynamics ◽

Gate Bias Stress

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Characterization of interface electrical properties in SiO2/InSb metal/insulator/semiconductor structures prepared by plasma-enhanced chemical vapour deposition

Thin Solid Films ◽

10.1016/0040-6090(87)90317-8 ◽

1987 ◽

Vol 148 (3) ◽

pp. 243-250 ◽

Cited By ~ 9

Author(s):

K.G. Germanova ◽

E.P. Valcheva

Keyword(s):

Electrical Properties ◽

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Chemical Vapour ◽

Metal Insulator ◽

Metal Insulator Semiconductor ◽

Semiconductor Structures

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Electrical properties of metal-insulator-metal and metal-insulator-semiconductor structures containing Langmuir-Blodgett insulating multilayers

Thin Solid Films ◽

10.1016/0040-6090(89)90173-9 ◽

1989 ◽

Vol 179 (1-2) ◽

pp. 121-127 ◽

Cited By ~ 12

Author(s):

F Kaneko ◽

M Shibata ◽

Y Inaba ◽

S Kobayashi

Keyword(s):

Electrical Properties ◽

Metal Insulator ◽

Metal Insulator Semiconductor ◽

Langmuir Blodgett ◽

Semiconductor Structures ◽

Metal Insulator Metal

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