Development of preferred orientation in polycrystalline NaCl-structure δ-TaN layers grown by reactive magnetron sputtering: Role of low-energy ion surface interactions

2002 ◽  
Vol 92 (9) ◽  
pp. 5084-5093 ◽  
Author(s):  
C.-S. Shin ◽  
D. Gall ◽  
Y.-W. Kim ◽  
N. Hellgren ◽  
I. Petrov ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Surface Interactions ◽  
Preferred Orientation ◽  
Low Energy ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron

Role of carbon in the formation of hard Ge1−xCx thin films by reactive magnetron sputtering

2011 ◽  
Vol 406 (13) ◽  
pp. 2658-2662 ◽  
Author(s):  
Chaoquan Hu ◽  
Liang Qiao ◽  
Hongwei Tian ◽  
Xianyi Lu ◽  
Qing Jiang ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron

Preferred orientation and film structure of TaN films deposited by reactive magnetron sputtering

2004 ◽  
Vol 22 (2) ◽  
pp. 332-338 ◽  
Author(s):  
Suguru Noda ◽  
Kun Tepsanongsuk ◽  
Yoshiko Tsuji ◽  
Yuya Kajikawa ◽  
Yoshifumi Ogawa ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Film Structure ◽  
Preferred Orientation ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron
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