Radio frequency linear ion beam source with 6 cm×66 cm beam

2000 ◽  
Vol 71 (2) ◽  
pp. 1029-1031 ◽  
Author(s):  
D. Siegfried ◽  
B. Buchholtz ◽  
D. Burtner ◽  
W. Foster
Keyword(s):  
Radio Frequency ◽  
Ion Beam ◽  
Beam Source

Deposition of carbon nitride films by filtered cathodic vacuum arc combined with radio frequency ion beam source

2000 ◽  
Vol 9 (12) ◽  
pp. 2010-2018 ◽  
Author(s):  
Y.H Cheng ◽  
B.K Tay ◽  
S.P Lau ◽  
X Shi ◽  
H.C Chua ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Carbon Nitride ◽  
Ion Beam ◽  
Vacuum Arc ◽  
Beam Source ◽  
Filtered Cathodic Vacuum Arc

Thirty-five centimeter diameter radio frequency ion-beam source

1998 ◽  
Vol 69 (2) ◽  
pp. 874-876 ◽  
Author(s):  
V. Kanarov ◽  
A. V. Hayes ◽  
R. Yevtukhov ◽  
B. Vidinsky ◽  
A. Navy
Keyword(s):  
Radio Frequency ◽  
Ion Beam ◽  
Beam Source

Synthesis of Superhard and Elastic Carbon Nitride Films by Filtered Cathodic Vacuum arc Combined with Radio Frequency Ion Beam Source

2002 ◽  
Vol 17 (3) ◽  
pp. 521-524 ◽  
Author(s):  
Y. H. Cheng ◽  
B. K. Tay ◽  
S. P. Lau ◽  
X. Shi ◽  
X. L. Qiao ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Carbon Nitride ◽  
Elastic Recovery ◽  
Ion Beam ◽  
Film Surface ◽  
Membered Ring ◽  
Vacuum Arc ◽  
Nitride Film ◽  
Beam Source ◽  
Filtered Cathodic Vacuum Arc

Superhard and elastic carbon nitride films with hardness and elastic recovery of 47 GPa and 87.5%, respectively, were synthesized by using a double-bend filtered cathodic vacuum arc combined with radio-frequency nitrogen ion beam source. The bombardment of energetic nitrogen atom onto the growing film surface results in the high atomic ratio of N/C (0.4), which contributes to the high sp2 content and the formation of a five-membered ring structure in the carbon nitride film at room temperature. The buckling of the five-membered ring basal planes may facilitate cross-linking between the planes through sp3 coordinated carbon atoms. A rigid three-dimensional network is formed, which contributes to the high hardness and elastic recovery of the deposited films.

An ultra-low energy (30–200 eV) ion-atomic beam source for ion-beam-assisted deposition in ultrahigh vacuum

2011 ◽  
Vol 82 (8) ◽  
pp. 083302 ◽  
Author(s):  
Jindřich Mach ◽  
Tomáš Šamořil ◽  
Stanislav Voborný ◽  
Miroslav Kolíbal ◽  
Jakub Zlámal ◽  
...  
Keyword(s):  
Atomic Beam ◽  
Ion Beam ◽  
Ultrahigh Vacuum ◽  
Low Energy ◽  
Beam Source ◽  
Atomic Beam Source ◽  
Ion Beam Assisted Deposition

Development of an intense pulsed metallic ion beam source

1988 ◽  
Vol 16 (4) ◽  
pp. 459-464 ◽  
Author(s):  
Y. Nakagawa ◽  
T. Ariyoshi
Keyword(s):  
Ion Beam ◽  
Beam Source
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