An ultra-low energy (30–200 eV) ion-atomic beam source for ion-beam-assisted deposition in ultrahigh vacuum

2011 ◽  
Vol 82 (8) ◽  
pp. 083302 ◽  
Author(s):  
Jindřich Mach ◽  
Tomáš Šamořil ◽  
Stanislav Voborný ◽  
Miroslav Kolíbal ◽  
Jakub Zlámal ◽  
...  
Keyword(s):  
Atomic Beam ◽  
Ion Beam ◽  
Ultrahigh Vacuum ◽  
Low Energy ◽  
Beam Source ◽  
Atomic Beam Source ◽  
Ion Beam Assisted Deposition

A low energy ion beam assisted deposition technique for realizing iso-type SiGe/Si hetero-interface diodes

1996 ◽  
Vol 283 (1-2) ◽  
pp. 182-187
Author(s):  
S Mohajerzadeh ◽  
C.R Selvakumar ◽  
D.E Brodie ◽  
M.D Robertson ◽  
J.M Corbett
Keyword(s):  
Ion Beam ◽  
Low Energy ◽  
Deposition Technique ◽  
Ion Beam Assisted Deposition

Real-time adjustable, 11 μs FWHM, >5 kHz, piezo electric pulsed atomic beam source

2018 ◽  
Vol 89 (10) ◽  
pp. 103115
Author(s):  
Anthony Catanese ◽  
Spencer Horton ◽  
Yusong Liu ◽  
Thomas Weinacht
Keyword(s):  
Real Time ◽  
Atomic Beam ◽  
Beam Source ◽  
Atomic Beam Source ◽  
Piezo Electric

Dense arrays of Ge nanoclusters induced by low-energy ion-beam assisted deposition on Si02 films

2006 ◽  
Author(s):  
A. V. Dvurechenskii ◽  
P. L. Novikov ◽  
Y. Khang ◽  
Zh. V. Smagina ◽  
V. A. Armbrister ◽  
...  
Keyword(s):  
Ion Beam ◽  
Low Energy ◽  
Ion Beam Assisted Deposition ◽  
Dense Arrays

A new atomic beam source: The ‘‘candlestick’’

1994 ◽  
Vol 65 (12) ◽  
pp. 3746-3750 ◽  
Author(s):  
Lene Vestergaard Hau ◽  
J. A. Golovchenko ◽  
Michael M. Burns
Keyword(s):  
Atomic Beam ◽  
Beam Source ◽  
Atomic Beam Source

Low‐energy (5

1995 ◽  
Vol 13 (6) ◽  
pp. 2836-2842 ◽  
Author(s):  
Y.‐W. Kim ◽  
I. Petrov ◽  
H. Ito ◽  
J. E. Greene
Keyword(s):  
Ion Beam ◽  
Ultrahigh Vacuum ◽  
Ion Source ◽  
Low Energy ◽  
High Brightness ◽  
Ion Beam Deposition ◽  
Beam Deposition
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