scholarly journals Stability studies of ZnO and AlN thin film acoustic wave devices in acid and alkali harsh environments

RSC Advances ◽  
2020 ◽  
Vol 10 (33) ◽  
pp. 19178-19184
Author(s):  
Shuo Xiong ◽  
Xudong Liu ◽  
Jian Zhou ◽  
Yi Liu ◽  
Yiping Shen ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Lab On A Chip ◽  
Harsh Environments ◽  
Stability Studies ◽  
Piezoelectric Thin Films ◽  
Saw Devices ◽  
Acoustic Wave Devices

Surface acoustic wave (SAW) devices based on piezoelectric thin-films such as ZnO and AlN are widely used in sensing, microfluidics and lab-on-a-chip applications.

Surface Acoustic Wave Devices: Materials Stability in Harsh Environments

2012 ◽  
Vol 1519 ◽  
Author(s):  
Denny Richter ◽  
Michal Schulz ◽  
Sergey Sakharov ◽  
Zachary J. Davis ◽  
Holger Fritze
Keyword(s):  
High Temperature ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Harsh Environments ◽  
Platinum Electrodes ◽  
Saw Devices ◽  
Passivation Layers ◽  
Acoustic Wave Devices ◽  
Gallium Content ◽  
The Stability

ABSTRACTThe availability of high-temperature stable surface acoustic wave (SAW) devices would enable realization of wireless sensors for monitoring high-temperature processes. One of the most promising substrate materials for SAW based high-temperature sensors is langasite (LGS, La3Ga5SiO14). It can be excited piezoelectrically up to its melting point at 1470 °C. However, gallium evaporation and degradation of the electrodes limit the application of LGS in SAW sensors for harsh environments to some extent.The objectives of this work include the investigation of the gallium loss in the vicinity of the langasite surface in oxidizing, reducing and vacuum conditions at temperatures up to 900 °C. The gallium content in the vicinity of the LGS surface is not decreased after annealing the samples in air, while a significant gallium loss occurs in vacuum and reducing atmospheres (0.5 % H2/Ar). The latter results in a gallium oxide deficient region of 1.5 μm below the surface after annealing for 12 hours at 900 °C. The gallium loss is virtually completely suppressed after protecting the surface with a thin alumina film.Further, thin-film electrodes based on platinum and platinum/rhodium are tested. While conventional platinum based electrodes are completely destroyed at 900 °C within hours due to agglomeration, alumina protected electrodes can be operated at least for several days at this temperature. After 400 hours at 700 °C, the alumina protected platinum electrodes show insignificant degradation. The influence of alumina passivation layers on the stability of the SAW devices is examined. Different electrode configurations are tested with respect to their long-term frequency stability at 650 °C.

Low loss surface acoustic wave SAW devices based on Al1-xMxN (M=Cr, Y, Sc) thin films

2021 ◽  
pp. 412990
Author(s):  
Saad Amara ◽  
Fares Kanouni ◽  
Farouk Laidoudi ◽  
Khaled Bouamama
Keyword(s):  
Thin Films ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Low Loss ◽  
Saw Devices

scholarly journals Fatigue Characteristics of Magnetostrictive Thin-Film Coated Surface Acoustic Wave Devices for Sensing Magnetic Field

IEEE Access ◽  
2020 ◽  
Vol 8 ◽  
pp. 38347-38354 ◽  
Author(s):  
Yana Jia ◽  
Wen Wang ◽  
Yuan Sun ◽  
Mengwei Liu ◽  
Xufeng Xue ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Thin Film ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Coated Surface ◽  
Fatigue Characteristics ◽  
Acoustic Wave Devices

Flexible surface acoustic wave devices and its applications in microfluidics

2014 ◽  
Vol 1659 ◽  
pp. 27-33
Author(s):  
Jian Zhou ◽  
Xingli He ◽  
Wenbo Wang ◽  
Nana Hu ◽  
Hao Jin ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Flexible Electronics ◽  
Lamb Waves ◽  
Acoustic Streaming ◽  
Plastic Films ◽  
Saw Devices ◽  
Flexible Surface ◽  
Developed Surface ◽  
Acoustic Wave Devices

Abstract:Flexible electronics and microsystems are an emerging technology with a tremedous impact to the future electronics and information technology and widespread applications. Various devices and microsystems have been developed. Surface acoustic wave (SAW) devices are a type of essential device for electronics, microsensors and microsystems; however there is no activity on the development of flexible SAW devices yet. This paper reports the development of flexible SAW devices on cheap, bendable and disposable plastic films. Flexible SAW devices with resonant frequency of 198.1 MHz and 447 MHz for the Rayleigh and Lamb waves respectively have been obtained with a large transmission signal up to 18dB. The flexible SAW devices have also demonstrated their ability for acoustic streaming with a velocity up to 3.4 cm/s and for particle concentration. The results have clearly demonstrated that the flexible SAW devices have great potential for applications in electronics and microsystems.

Bendable ZnO thin film surface acoustic wave devices on polyethylene terephthalate substrate

2014 ◽  
Vol 104 (21) ◽  
pp. 213504 ◽  
Author(s):  
Xingli He ◽  
Hongwei Guo ◽  
Jinkai Chen ◽  
Wenbo Wang ◽  
Weipeng Xuan ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Polyethylene Terephthalate ◽  
Film Surface ◽  
Zno Thin Film ◽  
Thin Film Surface ◽  
Acoustic Wave Devices ◽  
Polyethylene Terephthalate Substrate

Surface Acoustic Wave Device on (AlN/LGS) Substrate

2007 ◽  
Vol 124-126 ◽  
pp. 53-56
Author(s):  
Sean Wu ◽  
Zhi Xun Lin ◽  
Maw Shung Lee
Keyword(s):  
Thin Films ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Electromechanical Coupling ◽  
Chemical Properties ◽  
Temperature Stability ◽  
Rf Magnetron Sputtering ◽  
High Temperature Stability ◽  
Saw Devices ◽  
Stable Chemical

Langasite (La3Ga5SiO14 or abbreviated as LGS) single crystal is an attractive substrate for surface acoustic wave (SAW) devices requiring good temperature stability and higher electromechanical coupling constant than quartz. AlN thin films are attractive materials that have some excellent characteristics, such as high SAW velocity, piezoelectricity, high-temperature stability, and stable chemical properties. In this study, AlN thin films were deposited on LGS to be a new composite SAW substrate (AlN/LGS) by reactive RF magnetron sputtering method. SAW delay-line device was manufactured on this substrate. The performance of the device was measured by network analyzer (Agilent 8753E).The results exhibited the composite substrate (AlN/LGS) increased the Rayleigh wave velocity, decreased the insertion loss of SAW devices, and suppressed the harmonic response.

Sign in / Sign up

Export Citation Format

Share Document