Unusual photoluminescence properties in amorphous silicon nanopowder produced by plasma enhanced chemical vapor deposition

J. Costa; P. Roura; G. Sardin; J. R. Morante; E. Bertran

doi:10.1063/1.111130

Unusual photoluminescence properties in amorphous silicon nanopowder produced by plasma enhanced chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.111130 ◽

1994 ◽

Vol 64 (4) ◽

pp. 463-465 ◽

Cited By ~ 23

Author(s):

J. Costa ◽

P. Roura ◽

G. Sardin ◽

J. R. Morante ◽

E. Bertran

Keyword(s):

Chemical Vapor Deposition ◽

Amorphous Silicon ◽

Vapor Deposition ◽

Chemical Vapor ◽

Photoluminescence Properties ◽

Silicon Nanopowder

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Optoelectronic Properties of Amorphous Silicon Using the Plasma-Enhanced Chemical Vapor Deposition (PECVD) Technique

Plasma Deposition of Amorphous Silicon-Based Materials ◽

10.1016/b978-012137940-7/50006-1 ◽

1995 ◽

pp. 243-282 ◽

Cited By ~ 1

Author(s):

Arun Madan

Keyword(s):

Chemical Vapor Deposition ◽

Amorphous Silicon ◽

Vapor Deposition ◽

Chemical Vapor ◽

Optoelectronic Properties

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Device Relevant Doped Amorphous Silicon Thin Films by Inductively Coupled Plasma Enhanced Chemical Vapor Deposition

2018 IEEE 7th World Conference on Photovoltaic Energy Conversion (WCPEC) (A Joint Conference of 45th IEEE PVSC, 28th PVSEC & 34th EU PVSEC) ◽

10.1109/pvsc.2018.8548298 ◽

2018 ◽

Author(s):

Boon Heng TEO ◽

Jin LIU ◽

Jia GE ◽

Delio PEREZ ◽

Edwin CARMONA ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Amorphous Silicon ◽

Vapor Deposition ◽

Inductively Coupled Plasma ◽

Chemical Vapor ◽

Inductively Coupled ◽

Silicon Thin Films

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In situ optical diagnosis on hydrogenated amorphous silicon grown by vibration superimposed plasma chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.114284 ◽

1995 ◽

Vol 66 (9) ◽

pp. 1071-1073 ◽

Cited By ~ 5

Author(s):

Nobuo Naito ◽

Akihiro Takano ◽

Masatomo Sumiya ◽

Masashi Kawasaki ◽

Hideomi Koinuma

Keyword(s):

Chemical Vapor Deposition ◽

Amorphous Silicon ◽

Vapor Deposition ◽

Hydrogenated Amorphous Silicon ◽

Chemical Vapor ◽

Optical Diagnosis ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Hydrogenated Amorphous

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X‐ray photoelectron spectroscopy analysis of photostimulated chemical vapor deposition hydrogenated amorphous silicon/amorphous aluminum oxide

Applied Physics Letters ◽

10.1063/1.107407 ◽

1992 ◽

Vol 60 (10) ◽

pp. 1208-1210 ◽

Cited By ~ 1

Author(s):

K. Uwasawa ◽

F. Ishihara ◽

S. Matsumoto

Keyword(s):

Chemical Vapor Deposition ◽

Aluminum Oxide ◽

Amorphous Silicon ◽

Vapor Deposition ◽

Photoelectron Spectroscopy ◽

Hydrogenated Amorphous Silicon ◽

Chemical Vapor ◽

Spectroscopy Analysis ◽

X Ray ◽

Hydrogenated Amorphous

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Effects of silicon–hydrogen bond characteristics on the crystallization of hydrogenated amorphous silicon films prepared by plasma enhanced chemical vapor deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.582049 ◽

1999 ◽

Vol 17 (6) ◽

pp. 3240-3245 ◽

Cited By ~ 21

Author(s):

Hae-Yeol Kim ◽

Jae-Beom Choi ◽

Jai-Young Lee

Keyword(s):

Hydrogen Bond ◽

Chemical Vapor Deposition ◽

Amorphous Silicon ◽

Vapor Deposition ◽

Hydrogenated Amorphous Silicon ◽

Chemical Vapor ◽

Silicon Films ◽

Hydrogenated Amorphous ◽

Bond Characteristics

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ChemInform Abstract: Some Physical Properties of Undoped Amorphous Silicon Prepared by a New Chemical Vapor Deposition Process Using Iodosilanes.

ChemInform ◽

10.1002/chin.199043028 ◽

1990 ◽

Vol 21 (43) ◽

Author(s):

G. TAMIZHMANI ◽

M. COCIVERA ◽

R. T. OAKLEY ◽

P. DEL BEL BELLUZ

Keyword(s):

Chemical Vapor Deposition ◽

Physical Properties ◽

Amorphous Silicon ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Vapor Deposition Process

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Amorphous silicon–carbon nanospheres synthesized by chemical vapor deposition using cheap methyltrichlorosilane as improved anode materials for Li-ion batteries

Nanoscale ◽

10.1039/c3nr00635b ◽

2013 ◽

Vol 5 (12) ◽

pp. 5384 ◽

Cited By ~ 34

Author(s):

Zailei Zhang ◽

Meiju Zhang ◽

Yanhong Wang ◽

Qiangqiang Tan ◽

Xiao Lv ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Amorphous Silicon ◽

Vapor Deposition ◽

Anode Materials ◽

Chemical Vapor ◽

Li Ion Batteries ◽

Carbon Nanospheres ◽

Silicon Carbon ◽

Li Ion

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Conformal coating of amorphous silicon and germanium by high pressure chemical vapor deposition for photovoltaic fabrics

APL Materials ◽

10.1063/1.5020814 ◽

2018 ◽

Vol 6 (4) ◽

pp. 046105 ◽

Cited By ~ 5

Author(s):

Xiaoyu Ji ◽

Hiu Yan Cheng ◽

Alex J. Grede ◽

Alex Molina ◽

Disha Talreja ◽

...

Keyword(s):

High Pressure ◽

Chemical Vapor Deposition ◽

Amorphous Silicon ◽

Vapor Deposition ◽

Chemical Vapor ◽

Conformal Coating ◽

Pressure Chemical ◽

Silicon And Germanium

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Influence of RF Bias on Hydrogenated Amorphous Silicon by High-Density Plasma Chemical Vapor Deposition

Journal of The Electrochemical Society ◽

10.1149/1.2713723 ◽

2007 ◽

Vol 154 (5) ◽

pp. G122 ◽

Cited By ~ 9

Author(s):

Wen-Chu Hsiao ◽

Chuan-Pu Liu ◽

Ying-Lang Wang

Keyword(s):

Chemical Vapor Deposition ◽

Amorphous Silicon ◽

Vapor Deposition ◽

Hydrogenated Amorphous Silicon ◽

Chemical Vapor ◽

High Density ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Hydrogenated Amorphous ◽

Density Plasma

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Investigation of particle formation during the plasma enhanced chemical vapor deposition of amorphous silicon, oxide, and nitride films

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.589851 ◽

1998 ◽

Vol 16 (2) ◽

pp. 483 ◽

Cited By ~ 9

Author(s):

N. P. Rao

Keyword(s):

Chemical Vapor Deposition ◽

Amorphous Silicon ◽

Vapor Deposition ◽

Silicon Oxide ◽

Chemical Vapor ◽

Particle Formation ◽

Amorphous Silicon Oxide

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