Effects of silicon–hydrogen bond characteristics on the crystallization of hydrogenated amorphous silicon films prepared by plasma enhanced chemical vapor deposition

1999 ◽  
Vol 17 (6) ◽  
pp. 3240-3245 ◽  
Author(s):  
Hae-Yeol Kim ◽  
Jae-Beom Choi ◽  
Jai-Young Lee
Keyword(s):  
Hydrogen Bond ◽  
Chemical Vapor Deposition ◽  
Amorphous Silicon ◽  
Vapor Deposition ◽  
Hydrogenated Amorphous Silicon ◽  
Chemical Vapor ◽  
Silicon Films ◽  
Hydrogenated Amorphous ◽  
Bond Characteristics

scholarly journals High Pressure Chemical Vapor Deposition of Hydrogenated Amorphous Silicon Films and Solar Cells

2016 ◽  
Vol 28 (28) ◽  
pp. 5939-5942 ◽  
Author(s):  
Rongrui He ◽  
Todd D. Day ◽  
Justin R. Sparks ◽  
Nichole F. Sullivan ◽  
John V. Badding
Keyword(s):  
High Pressure ◽  
Solar Cells ◽  
Chemical Vapor Deposition ◽  
Amorphous Silicon ◽  
Vapor Deposition ◽  
Hydrogenated Amorphous Silicon ◽  
Chemical Vapor ◽  
Silicon Films ◽  
Pressure Chemical ◽  
Hydrogenated Amorphous

Doped hydrogenated amorphous silicon films by laser‐induced chemical vapor deposition

1986 ◽  
Vol 48 (2) ◽  
pp. 171-173 ◽  
Author(s):  
H. M. Branz ◽  
S. Fan ◽  
J. H. Flint ◽  
B. T. Fiske ◽  
D. Adler ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Amorphous Silicon ◽  
Vapor Deposition ◽  
Hydrogenated Amorphous Silicon ◽  
Chemical Vapor ◽  
Silicon Films ◽  
Hydrogenated Amorphous
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