Gas phase reactions of trimethylamine alane in low pressure organometallic vapor phase epitaxy of AlGaAs

1993 ◽  
Vol 62 (15) ◽  
pp. 1821-1823 ◽  
Author(s):  
B. L. Pitts ◽  
D. T. Emerson ◽  
J. R. Shealy
Keyword(s):  
Gas Phase ◽  
Vapor Phase ◽  
Low Pressure ◽  
Vapor Phase Epitaxy ◽  
Organometallic Vapor Phase Epitaxy ◽  
Gas Phase Reactions ◽  
Trimethylamine Alane

Selective growth of InP on patterned, nonplanar InP substrates by low-pressure organometallic vapor phase epitaxy

1990 ◽  
Vol 19 (11) ◽  
pp. 1313-1317 ◽  
Author(s):  
Rong -Ting Huang ◽  
Ching -Long Jiang ◽  
Ami Appelbaum ◽  
Daniel Renner ◽  
Stanley W. Zehr
Keyword(s):  
Vapor Phase ◽  
Low Pressure ◽  
Vapor Phase Epitaxy ◽  
Selective Growth ◽  
Organometallic Vapor Phase Epitaxy ◽  
Inp Substrates

Heavily dopedp‐GaAs grown by low‐pressure organometallic vapor phase epitaxy using liquid CCl4

1992 ◽  
Vol 72 (5) ◽  
pp. 2063-2065 ◽  
Author(s):  
L. W. Yang ◽  
P. D. Wright ◽  
V. Eu ◽  
Z. H. Lu ◽  
A. Majerfeld
Keyword(s):  
Vapor Phase ◽  
Low Pressure ◽  
Vapor Phase Epitaxy ◽  
Organometallic Vapor Phase Epitaxy

multiquantum barrier structures prepared by low-pressure organometallic vapor phase epitaxy

1995 ◽  
Vol 38 (12) ◽  
pp. 2001-2004 ◽  
Author(s):  
Hung-Pin Shiao ◽  
Chi-Yu Wang ◽  
Yuan-Kuang Tu ◽  
Wei Lin ◽  
Ching-Ting Lee
Keyword(s):  
Vapor Phase ◽  
Low Pressure ◽  
Vapor Phase Epitaxy ◽  
Organometallic Vapor Phase Epitaxy
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