Insitureflectivity measurement in a rapid thermal processor for the study of platinum silicide formation

1989 ◽  
Vol 55 (21) ◽  
pp. 2225-2226 ◽  
Author(s):  
Jean‐Marie Dilhac ◽  
Christian Ganibal ◽  
Thierry Castan
Keyword(s):  
Silicide Formation ◽  
Platinum Silicide

Platinum silicide formation on Si1−yCy epitaxial layers

2013 ◽  
Vol 574 ◽  
pp. 415-420 ◽  
Author(s):  
Kan-Rong Lee ◽  
I-Ping Lin ◽  
Hung-Tai Chang ◽  
Sheng-Wei Lee
Keyword(s):  
Epitaxial Layers ◽  
Silicide Formation ◽  
Platinum Silicide

On the kinetics of platinum silicide formation

2011 ◽  
Vol 98 (8) ◽  
pp. 082102 ◽  
Author(s):  
Erik J. Faber ◽  
Rob A. M. Wolters ◽  
Jurriaan Schmitz
Keyword(s):  
Silicide Formation ◽  
Platinum Silicide ◽  
Kinetics Of

Effect of Oxidizing Ambients on Platinum Silicide Formation: II . Auger and Backscattering Analyses

1975 ◽  
Vol 122 (12) ◽  
pp. 1732-1736 ◽  
Author(s):  
R. J. Blattner ◽  
C. A. Evans ◽  
S. S. Lau ◽  
J. W. Mayer ◽  
B. M. Ullrich
Keyword(s):  
Silicide Formation ◽  
Platinum Silicide

Effects of ion‐implantation‐induced damages and impurity on platinum silicide formation

1982 ◽  
Vol 53 (9) ◽  
pp. 6144-6147 ◽  
Author(s):  
Y. Mashiko ◽  
H. Koyama ◽  
S. Kawazu ◽  
T. Kashiwaki
Keyword(s):  
Ion Implantation ◽  
Silicide Formation ◽  
Platinum Silicide

Redistribution of As during Platinum Silicide Formation

1987 ◽  
Vol 103 (1) ◽  
pp. 125-130 ◽  
Author(s):  
S. V. Vasilev ◽  
N. N. Gerasimenko ◽  
V. V. Kalinin ◽  
V. S. Kulikauskas
Keyword(s):  
Silicide Formation ◽  
Platinum Silicide

Kinetics of platinum silicide formation during rapid thermal processing

1992 ◽  
Vol 72 (5) ◽  
pp. 1833-1836 ◽  
Author(s):  
A. K. Pant ◽  
S. P. Murarka ◽  
C. Shepard ◽  
W. Lanford
Keyword(s):  
Thermal Processing ◽  
Rapid Thermal Processing ◽  
Silicide Formation ◽  
Platinum Silicide ◽  
Kinetics Of

An analytical study of platinum silicide formation

1976 ◽  
Vol 37 (3) ◽  
pp. 441-452 ◽  
Author(s):  
J.B. Bindell ◽  
J.W. Colby ◽  
D.R. Wonsidler ◽  
J.M. Poate ◽  
D.K. Conley ◽  
...  
Keyword(s):  
Analytical Study ◽  
Silicide Formation ◽  
Platinum Silicide
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