Low-temperature remote plasma-enhanced atomic layer deposition of graphene and characterization of its atomic-level structure

2014 ◽  
Vol 2 (36) ◽  
pp. 7570-7574 ◽  
Author(s):  
Yijun Zhang ◽  
Wei Ren ◽  
Zhuangde Jiang ◽  
Shuming Yang ◽  
Weixuan Jing ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Low Temperatures ◽  
Level Structure ◽  
Atomic Layer ◽  
Atomic Level ◽  
Atomic Resolution ◽  
Remote Plasma ◽  
Layer Deposition

Atomic-resolution image of a graphene sheet synthesized by remote plasma-enhanced atomic layer deposition at low temperatures.

Characterization of dielectric layers grown at low temperature by atomic layer deposition

2015 ◽  
Vol 577 ◽  
pp. 97-102 ◽  
Author(s):  
Sylwia Gieraltowska ◽  
Lukasz Wachnicki ◽  
Bartlomiej S. Witkowski ◽  
Robert Mroczynski ◽  
Piotr Dluzewski ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Dielectric Layers ◽  
Layer Deposition

Characterization of Al2O3Thin Films Fabricated at Low Temperature via Atomic Layer Deposition on PEN Substrates

2014 ◽  
Vol 20 (4-5-6) ◽  
pp. 118-124 ◽  
Author(s):  
Kyung-Hyun Choi ◽  
Kamran Ali ◽  
Chang Young Kim ◽  
Nauman Malik Muhammad
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition

Moisture Barrier Properties of Al2O3Films deposited by Remote Plasma Atomic Layer Deposition at Low Temperatures

2013 ◽  
Vol 52 (3R) ◽  
pp. 035502 ◽  
Author(s):  
Hagyoung Choi ◽  
Sanghun Lee ◽  
Hyunsoo Jung ◽  
Seokyoon Shin ◽  
Giyul Ham ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Low Temperatures ◽  
Atomic Layer ◽  
Barrier Properties ◽  
Remote Plasma ◽  
Moisture Barrier ◽  
Layer Deposition

Characterization of Polymetal Gate Transistors With Low-Temperature Atomic-Layer-Deposition-Grown Oxide Spacer

2009 ◽  
Vol 30 (2) ◽  
pp. 181-184 ◽  
Author(s):  
Ga-Won Lee ◽  
Hi-Duck Lee ◽  
Kwan-Yong Lim ◽  
Yong Soo Kim ◽  
Hong-Sun Yang ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition
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