Characterization of ZnO film grown on polycarbonate by atomic layer deposition at low temperature

2015 ◽  
Vol 33 (1) ◽  
pp. 01A134 ◽  
Author(s):  
Gyeong Beom Lee ◽  
Gwon Deok Han ◽  
Joon Hyung Shim ◽  
Byoung-Ho Choi
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Zno Film ◽  
Layer Deposition

Characterization of dielectric layers grown at low temperature by atomic layer deposition

2015 ◽  
Vol 577 ◽  
pp. 97-102 ◽  
Author(s):  
Sylwia Gieraltowska ◽  
Lukasz Wachnicki ◽  
Bartlomiej S. Witkowski ◽  
Robert Mroczynski ◽  
Piotr Dluzewski ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Dielectric Layers ◽  
Layer Deposition

Low-temperature remote plasma-enhanced atomic layer deposition of graphene and characterization of its atomic-level structure

2014 ◽  
Vol 2 (36) ◽  
pp. 7570-7574 ◽  
Author(s):  
Yijun Zhang ◽  
Wei Ren ◽  
Zhuangde Jiang ◽  
Shuming Yang ◽  
Weixuan Jing ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Low Temperatures ◽  
Level Structure ◽  
Atomic Layer ◽  
Atomic Level ◽  
Atomic Resolution ◽  
Remote Plasma ◽  
Layer Deposition

Atomic-resolution image of a graphene sheet synthesized by remote plasma-enhanced atomic layer deposition at low temperatures.

Characterization of Al2O3Thin Films Fabricated at Low Temperature via Atomic Layer Deposition on PEN Substrates

2014 ◽  
Vol 20 (4-5-6) ◽  
pp. 118-124 ◽  
Author(s):  
Kyung-Hyun Choi ◽  
Kamran Ali ◽  
Chang Young Kim ◽  
Nauman Malik Muhammad
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition

Nitrogen-Doped ZnO Film Fabricated Via Rapid Low-Temperature Atomic Layer Deposition for High-Performance ZnON Transistors

2018 ◽  
Vol 65 (8) ◽  
pp. 3283-3290 ◽  
Author(s):  
Xingwei Ding ◽  
Jun Yang ◽  
Cunping Qin ◽  
Xuyong Yang ◽  
Tao Ding ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
High Performance ◽  
Atomic Layer ◽  
Zno Film ◽  
Nitrogen Doped ◽  
Layer Deposition ◽  
Doped Zno

Characterization of Polymetal Gate Transistors With Low-Temperature Atomic-Layer-Deposition-Grown Oxide Spacer

2009 ◽  
Vol 30 (2) ◽  
pp. 181-184 ◽  
Author(s):  
Ga-Won Lee ◽  
Hi-Duck Lee ◽  
Kwan-Yong Lim ◽  
Yong Soo Kim ◽  
Hong-Sun Yang ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition

Growth and characterization of polar and nonpolar ZnO film grown on sapphire substrates by using atomic layer deposition

2013 ◽  
Vol 546 ◽  
pp. 114-117 ◽  
Author(s):  
Ki-Wook Kim ◽  
Hyo-Soo Son ◽  
Nak-Jung Choi ◽  
Jihoon Kim ◽  
Sung-Nam Lee
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Zno Film ◽  
Sapphire Substrates ◽  
Layer Deposition
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