Surface-controlled growth of magnesium oxide thin films by atomic layer epitaxy

1999 ◽  
Vol 9 (10) ◽  
pp. 2449-2452 ◽  
Author(s):  
Matti Putkonen ◽  
Leena-Sisko Johansson ◽  
Eero Rauhala ◽  
Lauri Niinistö
Keyword(s):  
Thin Films ◽  
Magnesium Oxide ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Controlled Growth ◽  
Oxide Thin Films

Enhanced growth rate in atomic layer epitaxy deposition of magnesium oxide thin films

2000 ◽  
Vol 10 (8) ◽  
pp. 1857-1861 ◽  
Author(s):  
Matti Putkonen ◽  
Timo Sajavaara ◽  
Lauri Niinistö
Keyword(s):  
Thin Films ◽  
Growth Rate ◽  
Magnesium Oxide ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Oxide Thin Films

Growth of gallium oxide thin films from gallium acetylacetonate by atomic layer epitaxy

1996 ◽  
Vol 6 (1) ◽  
pp. 27-31 ◽  
Author(s):  
Minna Nieminen ◽  
Lauri Niinistö ◽  
Eero Rauhala
Keyword(s):  
Thin Films ◽  
Gallium Oxide ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Oxide Thin Films

Growth of Indium‐Tin‐Oxide Thin Films by Atomic Layer Epitaxy

1995 ◽  
Vol 142 (10) ◽  
pp. 3538-3541 ◽  
Author(s):  
Timo Asikainen ◽  
Mikko Ritala ◽  
Markku Leskelä
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Oxide Thin Films
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