Atomic Layer Epitaxy Growth of Tantalum Oxide Thin Films from Ta (  OC 2 H 5 ) 5 and  H 2 O

Kaupo Kukli; Mikko Ritala; Markku Leskelä

doi:10.1149/1.2048637

Atomic Layer Epitaxy Growth of Tantalum Oxide Thin Films from Ta ( OC 2 H 5 ) 5 and H 2 O

Journal of The Electrochemical Society ◽

10.1149/1.2048637 ◽

1995 ◽

Vol 142 (5) ◽

pp. 1670-1675 ◽

Cited By ~ 98

Author(s):

Kaupo Kukli ◽

Mikko Ritala ◽

Markku Leskelä

Keyword(s):

Thin Films ◽

Tantalum Oxide ◽

Atomic Layer ◽

Atomic Layer Epitaxy ◽

Oxide Thin Films

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ChemInform Abstract: Atomic Layer Epitaxy (ALE) Growth of Tantalum Oxide Thin Films from Ta( OC2H5)5 and H2O.

ChemInform ◽

10.1002/chin.199539281 ◽

2010 ◽

Vol 26 (39) ◽

pp. no-no

Author(s):

K. KUKLI ◽

M. RITALA ◽

M. LESKELAE

Keyword(s):

Thin Films ◽

Tantalum Oxide ◽

Atomic Layer ◽

Atomic Layer Epitaxy ◽

Oxide Thin Films

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In situ study of atomic layer epitaxy growth of tantalum oxide thin films from Ta(OC2H5)5 and H2O

Applied Surface Science ◽

10.1016/s0169-4332(96)00989-0 ◽

1997 ◽

Vol 112 ◽

pp. 236-242 ◽

Cited By ~ 53

Author(s):

Kaupo Kukli ◽

Jaan Aarik ◽

Aleks Aidla ◽

Hele Siimon ◽

Mikko Ritala ◽

...

Keyword(s):

Thin Films ◽

Tantalum Oxide ◽

Atomic Layer ◽

Atomic Layer Epitaxy ◽

Oxide Thin Films ◽

In Situ Study

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Growth of gallium oxide thin films from gallium acetylacetonate by atomic layer epitaxy

Journal of Materials Chemistry ◽

10.1039/jm9960600027 ◽

1996 ◽

Vol 6 (1) ◽

pp. 27-31 ◽

Cited By ~ 48

Author(s):

Minna Nieminen ◽

Lauri Niinistö ◽

Eero Rauhala

Keyword(s):

Thin Films ◽

Gallium Oxide ◽

Atomic Layer ◽

Atomic Layer Epitaxy ◽

Oxide Thin Films

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Atomic layer deposition of tantalum oxide thin films using the precursor tert -butylimido-tris-ethylmethylamido-tantalum and water: Process characteristics and film properties

Thin Solid Films ◽

10.1016/j.tsf.2017.02.047 ◽

2017 ◽

Vol 627 ◽

pp. 94-105 ◽

Cited By ~ 3

Author(s):

Thomas Henke ◽

Martin Knaut ◽

Marion Geidel ◽

Felix Winkler ◽

Matthias Albert ◽

...

Keyword(s):

Thin Films ◽

Atomic Layer Deposition ◽

Tantalum Oxide ◽

Atomic Layer ◽

Oxide Thin Films ◽

Film Properties ◽

Process Characteristics ◽

Layer Deposition

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Atomic Layer Epitaxy of Vanadium Oxide Thin Films and Electrochemical Behavior in Presence of Lithium Ions

Electrochemical and Solid-State Letters ◽

10.1149/1.1391187 ◽

1999 ◽

Vol 3 (10) ◽

pp. 485 ◽

Cited By ~ 74

Author(s):

J. C. Badot

Keyword(s):

Thin Films ◽

Vanadium Oxide ◽

Electrochemical Behavior ◽

Atomic Layer ◽

Atomic Layer Epitaxy ◽

Oxide Thin Films ◽

Lithium Ions ◽

Vanadium Oxide Thin Films

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Atomic layer epitaxy growth of aluminum oxide thin films from a novel Al(CH3)2Cl precursor and H2O

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580536 ◽

1997 ◽

Vol 15 (4) ◽

pp. 2214-2218 ◽

Cited By ~ 73

Author(s):

Kaupo Kukli ◽

Mikko Ritala ◽

Markku Leskelä ◽

Janne Jokinen

Keyword(s):

Thin Films ◽

Aluminum Oxide ◽

Atomic Layer ◽

Atomic Layer Epitaxy ◽

Oxide Thin Films

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Comparison of the Atomic Layer Deposition of Tantalum Oxide Thin Films Using Ta(NtBu)(NEt2)3, Ta(NtBu)(NEt2)2Cp, and H2O

ACS Applied Materials & Interfaces ◽

10.1021/acsami.6b11613 ◽

2016 ◽

Vol 9 (1) ◽

pp. 537-547 ◽

Cited By ~ 7

Author(s):

Seul Ji Song ◽

Taehyung Park ◽

Kyung Jean Yoon ◽

Jung Ho Yoon ◽

Dae Eun Kwon ◽

...

Keyword(s):

Thin Films ◽

Atomic Layer Deposition ◽

Tantalum Oxide ◽

Atomic Layer ◽

Oxide Thin Films ◽

Layer Deposition

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Atomic layer deposition of tantalum oxide thin films for their use as diffusion barriers in microelectronic devices

Microelectronic Engineering ◽

10.1016/j.mee.2009.06.015 ◽

2010 ◽

Vol 87 (3) ◽

pp. 373-378 ◽

Cited By ~ 30

Author(s):

A. Lintanf-Salaün ◽

A. Mantoux ◽

E. Djurado ◽

E. Blanquet

Keyword(s):

Thin Films ◽

Atomic Layer Deposition ◽

Tantalum Oxide ◽

Atomic Layer ◽

Diffusion Barriers ◽

Oxide Thin Films ◽

Microelectronic Devices ◽

Layer Deposition

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Properties of tantalum oxide thin films grown by atomic layer deposition

Thin Solid Films ◽

10.1016/0040-6090(94)06388-5 ◽

1995 ◽

Vol 260 (2) ◽

pp. 135-142 ◽

Cited By ~ 88

Author(s):

Kaupo Kukli ◽

Jaan Aarik ◽

Aleks Aidla ◽

Oksana Kohan ◽

Teet Uustare ◽

...

Keyword(s):

Thin Films ◽

Atomic Layer Deposition ◽

Tantalum Oxide ◽

Atomic Layer ◽

Oxide Thin Films ◽

Layer Deposition

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Growth of Indium‐Tin‐Oxide Thin Films by Atomic Layer Epitaxy

Journal of The Electrochemical Society ◽

10.1149/1.2050018 ◽

1995 ◽

Vol 142 (10) ◽

pp. 3538-3541 ◽

Cited By ~ 33

Author(s):

Timo Asikainen ◽

Mikko Ritala ◽

Markku Leskelä

Keyword(s):

Thin Films ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Atomic Layer ◽

Atomic Layer Epitaxy ◽

Oxide Thin Films

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