Surface Reactivity and Energetics of CH Radicals during Plasma Deposition of Hydrogenated Diamondlike Carbon Films

2006 ◽  
Vol 110 (43) ◽  
pp. 21911-21919 ◽  
Author(s):  
Jie Zhou ◽  
Ellen R. Fisher
Keyword(s):  
Plasma Deposition ◽  
Carbon Films ◽  
Surface Reactivity ◽  
Diamondlike Carbon

Using Molecular-Beam Mass Spectrometry to Study the Pecvd of Diamondlike Carbon Films

1993 ◽  
Vol 334 ◽  
Author(s):  
I.B. Graff ◽  
R.A. Pugliese ◽  
P.R. Westmoreland
Keyword(s):  
Mass Spectrometry ◽  
Vapor Deposition ◽  
Molecular Beam ◽  
Film Growth ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Total Flow ◽  
Measured Concentration ◽  
Molecular Beam Mass Spectrometry ◽  
Diamondlike Carbon

AbstractMolecular-beam mass spectrometry has been used to study plasma-enhanced chemical vapor deposition (PECVD) of diamondlike carbon films. A threshold-ionization technique was used to identify and quantify species in the plasma. Mole fractions of H, H2, CH4, C2H2, C2H6 and Ar were measured in an 83.3% CH4/Ar mixture at a pressure of 0.1 torr and a total flow of 30 sccm. Comparisons were made between mole fractions measured at plasma powers of 25W and 50W. These results were compared to measured concentration profiles and to film growth rates.

KrF excimer laser etching of diamondlike carbon films

1992 ◽  
Author(s):  
Taras V. Kononenko ◽  
Vitali I. Konov ◽  
Victor G. Ralchenko ◽  
V. E. Strelnitsky
Keyword(s):  
Excimer Laser ◽  
Carbon Films ◽  
Laser Etching ◽  
Diamondlike Carbon ◽  
Krf Excimer Laser

Synthesis technique of diamondlike carbon films by laser ablation ion source in atmosphere

1992 ◽  
Author(s):  
Kaoru Suzuki ◽  
Tetsuya Taniyama ◽  
Junji Nakata ◽  
Takaya Masutani
Keyword(s):  
Laser Ablation ◽  
Carbon Films ◽  
Ion Source ◽  
Synthesis Technique ◽  
Diamondlike Carbon

Surface Analysis of Carbon–Hydrogen Bonds in Diamondlike Carbon Films by X-ray Photoelectron Spectroscopy

2009 ◽  
Vol 48 (9) ◽  
pp. 092304 ◽  
Author(s):  
Susumu Takabayashi ◽  
Keishi Okamoto ◽  
Tatsuyuki Nakatani ◽  
Hiroyuki Sakaue ◽  
Takayuki Takahagi
Keyword(s):  
Hydrogen Bonds ◽  
Surface Analysis ◽  
Photoelectron Spectroscopy ◽  
Carbon Films ◽  
X Ray ◽  
Diamondlike Carbon ◽  
Carbon Hydrogen Bonds

Temperature and Water Vapor Pressure Effects on the Friction Coefficient of Hydrogenated Diamondlike Carbon Films

2009 ◽  
Vol 131 (3) ◽  
Author(s):  
Pamela L. Dickrell ◽  
N. Argibay ◽  
Osman L. Eryilmaz ◽  
Ali Erdemir ◽  
W. Gregory Sawyer
Keyword(s):  
Water Vapor ◽  
Friction Coefficient ◽  
Vapor Pressure ◽  
Water Vapor Pressure ◽  
Carbon Film ◽  
Transient Behavior ◽  
Carbon Films ◽  
Pressure Effects ◽  
Diamondlike Carbon ◽  
Gas Surface Interactions

Microtribological measurements of a hydrogenated diamondlike carbon film in controlled gaseous environments show that water vapor plays a significant role in the friction coefficient. These experiments reveal an initial high friction transient behavior that does not reoccur even after extended periods of exposure to low partial pressures of H2O and O2. Experiments varying both water vapor pressure and sample temperature show trends of a decreasing friction coefficient as a function of both the decreasing water vapor pressure and the increasing substrate temperature. Theses trends are examined with regard to first order gas-surface interactions. Model fits give activation energies on the order of 40 kJ/mol, which is consistent with water vapor desorption.

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