Surface Chemistry and Interface Formation during the Atomic Layer Deposition of Alumina from Trimethylaluminum and Water on Indium Phosphide

2013 ◽  
Vol 25 (7) ◽  
pp. 1078-1091 ◽  
Author(s):  
Christoph Adelmann ◽  
Daniel Cuypers ◽  
Massimo Tallarida ◽  
Leonard N. J. Rodriguez ◽  
Astrid De Clercq ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Indium Phosphide ◽  
Surface Chemistry ◽  
Atomic Layer ◽  
Interface Formation ◽  
Layer Deposition

scholarly journals Role of oligomer structures in the surface chemistry of amidinate metal complexes used for atomic layer deposition of thin films

2019 ◽  
Vol 35 (7) ◽  
pp. 720-731 ◽  
Author(s):  
Jonathan Guerrero-Sánchez ◽  
Bo Chen ◽  
Noboru Takeuchi ◽  
Francisco Zaera
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Surface Chemistry ◽  
Metal Complexes ◽  
Atomic Layer ◽  
Layer Deposition ◽  
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Abstract

scholarly journals Surface chemistry of LiNi0.5Mn1.5O4 particles coated by Al2O3 using atomic layer deposition for lithium-ion batteries

2015 ◽  
Vol 274 ◽  
pp. 1254-1262 ◽  
Author(s):  
Jin Wook Kim ◽  
Dong Hyeon Kim ◽  
Dae Yang Oh ◽  
Hyeyoun Lee ◽  
Ji Hyun Kim ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Surface Chemistry ◽  
Lithium Ion Batteries ◽  
Lithium Ion ◽  
Atomic Layer ◽  
Layer Deposition

An infrared study of the surface chemistry of titanium nitride atomic layer deposition on silica from TiCl4 and NH3

2006 ◽  
Vol 514 (1-2) ◽  
pp. 97-102 ◽  
Author(s):  
Mark Q. Snyder ◽  
Benjamin A. McCool ◽  
Joseph DiCarlo ◽  
Carl P. Tripp ◽  
William J. DeSisto
Keyword(s):  
Atomic Layer Deposition ◽  
Surface Chemistry ◽  
Titanium Nitride ◽  
Atomic Layer ◽  
Infrared Study ◽  
Layer Deposition
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