Methodology for Studying Surface Chemistry and Evolution during the Nucleation Phase of Atomic Layer Deposition Using Scanning Tunneling Microscopy

2017 ◽  
Vol 121 (49) ◽  
pp. 27379-27388 ◽  
Author(s):  
Dickson Thian ◽  
Yonas T. Yemane ◽  
Shicheng Xu ◽  
Fritz B. Prinz
Keyword(s):  
Atomic Layer Deposition ◽  
Surface Chemistry ◽  
Scanning Tunneling Microscopy ◽  
Atomic Layer ◽  
Scanning Tunneling ◽  
Tunneling Microscopy ◽  
Layer Deposition ◽  
Nucleation Phase

Scanning tunneling spectroscopy of lead sulfide quantum wells fabricated by atomic layer deposition

2010 ◽  
Vol 21 (48) ◽  
pp. 485402 ◽  
Author(s):  
Wonyoung Lee ◽  
Neil P Dasgupta ◽  
Hee Joon Jung ◽  
Jung-Rok Lee ◽  
Robert Sinclair ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Quantum Wells ◽  
Lead Sulfide ◽  
Atomic Layer ◽  
Scanning Tunneling Spectroscopy ◽  
Tunneling Spectroscopy ◽  
Scanning Tunneling ◽  
Layer Deposition

scholarly journals Role of oligomer structures in the surface chemistry of amidinate metal complexes used for atomic layer deposition of thin films

2019 ◽  
Vol 35 (7) ◽  
pp. 720-731 ◽  
Author(s):  
Jonathan Guerrero-Sánchez ◽  
Bo Chen ◽  
Noboru Takeuchi ◽  
Francisco Zaera
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Surface Chemistry ◽  
Metal Complexes ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Image Position

Abstract

scholarly journals Surface chemistry of LiNi0.5Mn1.5O4 particles coated by Al2O3 using atomic layer deposition for lithium-ion batteries

2015 ◽  
Vol 274 ◽  
pp. 1254-1262 ◽  
Author(s):  
Jin Wook Kim ◽  
Dong Hyeon Kim ◽  
Dae Yang Oh ◽  
Hyeyoun Lee ◽  
Ji Hyun Kim ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Surface Chemistry ◽  
Lithium Ion Batteries ◽  
Lithium Ion ◽  
Atomic Layer ◽  
Layer Deposition

An infrared study of the surface chemistry of titanium nitride atomic layer deposition on silica from TiCl4 and NH3

2006 ◽  
Vol 514 (1-2) ◽  
pp. 97-102 ◽  
Author(s):  
Mark Q. Snyder ◽  
Benjamin A. McCool ◽  
Joseph DiCarlo ◽  
Carl P. Tripp ◽  
William J. DeSisto
Keyword(s):  
Atomic Layer Deposition ◽  
Surface Chemistry ◽  
Titanium Nitride ◽  
Atomic Layer ◽  
Infrared Study ◽  
Layer Deposition
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