scholarly journals Role of oligomer structures in the surface chemistry of amidinate metal complexes used for atomic layer deposition of thin films

2019 ◽  
Vol 35 (7) ◽  
pp. 720-731 ◽  
Author(s):  
Jonathan Guerrero-Sánchez ◽  
Bo Chen ◽  
Noboru Takeuchi ◽  
Francisco Zaera
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Surface Chemistry ◽  
Metal Complexes ◽  
Atomic Layer ◽  
Layer Deposition ◽  
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Abstract

Atomic layer deposition of epitaxial HfO2 thin films on r-cut sapphire

2013 ◽  
Vol 28 (13) ◽  
pp. 1680-1686 ◽  
Author(s):  
Hugo Mändar ◽  
Raul Rammula ◽  
Aleks Aidla ◽  
Jaan Aarik
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
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Abstract

scholarly journals Atomic layer deposition of zirconium oxide thin films

2019 ◽  
Vol 35 (7) ◽  
pp. 804-812
Author(s):  
Xin Wang ◽  
Sujan Kumar Ghosh ◽  
Mahyar Afshar-Mohajer ◽  
Hua Zhou ◽  
Yongqiang Liu ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Zirconium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
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Abstract

(Invited) Area-Selective Atomic Layer Deposition: Role of Surface Chemistry

2017 ◽  
Vol 80 (3) ◽  
pp. 39-48 ◽  
Author(s):  
Alfredo Mameli ◽  
Bora Karasulu ◽  
Marcel A. Verheijen ◽  
Adriaan J.M. Mackus ◽  
W. M. M. Kessels ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Surface Chemistry ◽  
Atomic Layer ◽  
Layer Deposition

Atomic Layer Deposition on Polymer Thin Films: On the Role of Precursor Infiltration and Reactivity

2021 ◽  
Author(s):  
Robin R. Petit ◽  
Jin Li ◽  
Babs Van de Voorde ◽  
Sandra Van Vlierberghe ◽  
Philippe F. Smet ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Polymer Thin Films ◽  
Atomic Layer ◽  
Layer Deposition
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