Effects of arrival ratio and inclined angle on the orientation competition in ion beam assisting deposited yttria-stabilized zirconia thin films

2012 ◽  
Vol 473 ◽  
pp. 57-60
Author(s):  
Z.J. Zhao ◽  
Z. Wang ◽  
H.P. Lu ◽  
Y.L. Li ◽  
F. Feng ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Yttria Stabilized Zirconia ◽  
Stabilized Zirconia ◽  
Inclined Angle

An orientation competition in yttria-stabilized zirconia thin films fabricated by ion beam assisted sputtering deposition

2011 ◽  
Vol 520 (3) ◽  
pp. 1115-1119 ◽  
Author(s):  
Z. Wang ◽  
Z.J. Zhao ◽  
B.J. Yan ◽  
Y.L. Li ◽  
F. Feng ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Yttria Stabilized Zirconia ◽  
Stabilized Zirconia ◽  
Sputtering Deposition

Role of Yttria-stabilized Zirconia Produced by Ion-beam-assisted Deposition on the Properties of RuO2 on SiO2/Si

1998 ◽  
Vol 13 (9) ◽  
pp. 2461-2464 ◽  
Author(s):  
Q. X. Jia ◽  
P. Arendt ◽  
J. R. Groves ◽  
Y. Fan ◽  
J. M. Roper ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Substrate Surface ◽  
Residual Resistivity ◽  
Yttria Stabilized Zirconia ◽  
Room Temperature Resistivity ◽  
Stabilized Zirconia ◽  
Residual Resistivity Ratio ◽  
Resistivity Ratio ◽  
Ion Beam Assisted Deposition

Highly conductive biaxially textured RuO2 thin films were deposited on technically important SiO2/Si substrates by pulsed laser deposition, where yttria-stabilized zirconia (YSZ) produced by ion-beam-assisted-deposition (IBAD) was used as a template to enhance the biaxial texture of RuO2 on SiO2/Si. The biaxially oriented RuO2 had a room-temperature resistivity of 37 μΔ-cm and residual resistivity ratio above 2. We then deposited Ba0.5Sr0.5TiO3 thin films on RuO2/IBAD-YSZ/SiO2/Si. The Ba0.5Sr0.5TiO3 had a pure (111) orientation normal to the substrate surface and a dielectric constant above 360 at 100 kHz.

scholarly journals Effect of ion-beam parameters on in-plane texture of yttria-stabilized zirconia thin films

2001 ◽  
Vol 11 (1) ◽  
pp. 3485-3488 ◽  
Author(s):  
T.G. Truchan ◽  
M.P. Chudzik ◽  
B.L. Fisher ◽  
R.A. Erck ◽  
K.C. Goretta ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Yttria Stabilized Zirconia ◽  
Stabilized Zirconia ◽  
Beam Parameters

Growth of Biaxially Textured Yttria-Stabilized Zirconia Thin Films on Si(111) Substrate by Ion Beam Assisted Deposition

2000 ◽  
Vol 17 (3) ◽  
pp. 221-223
Author(s):  
Hai-Chuan Mu (Hai-Cuan Mu) ◽  
Cong-Xin Ren ◽  
Bing-Yao Jiang ◽  
Xing-Zhao Ding ◽  
Yue-Hui Yu ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Yttria Stabilized Zirconia ◽  
Stabilized Zirconia ◽  
Ion Beam Assisted Deposition

Electrochemical behavior of silver thin films interfaced with yttria-stabilized zirconia

2014 ◽  
Vol 18 (8) ◽  
pp. 2267-2277 ◽  
Author(s):  
Michèle Fee ◽  
Spyridon Ntais ◽  
Arnaud Weck ◽  
Elena A. Baranova
Keyword(s):  
Thin Films ◽  
Electrochemical Behavior ◽  
Yttria Stabilized Zirconia ◽  
Stabilized Zirconia ◽  
Silver Thin Films
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