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Electrical Characteristics ◽  
Remote Plasma ◽  
Plasma Nitridation

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Vol 598 (1) ◽  
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Author(s):  
Sung Woo Lee ◽  
Dong Wook Kim ◽  
Hyunji Shin ◽  
Jong Sun Choi ◽  
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scholarly journals Structural and electrical characteristics of high-κ Er2O3 and Er2TiO5 gate dielectrics for a-IGZO thin-film transistors

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Yasuhiro H Matsuda ◽  
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Yueh Chin Lin ◽  
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Li-Chen Yen ◽  
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Electrical Characteristics ◽  
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