Abnormal grain growth in copper films during magnetically enhanced plasma processing
1992 ◽
Vol 21
(12)
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pp. 1087-1091
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2003 ◽
Vol 48
(6)
◽
pp. 683-688
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Keyword(s):
2001 ◽
Vol 226
(1)
◽
pp. 168-174
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Keyword(s):
2015 ◽
Vol 19
(sup4)
◽
pp. S251-S254
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