In situ measurement of silicon oxidation kinetics by monitoring spectrally emitted radiation
1987 ◽
Vol 22
(10)
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pp. 3595-3601
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In situ investigation of mesoporous silicon oxidation kinetics using infrared emittance spectroscopy
2016 ◽
Vol 18
(27)
◽
pp. 18201-18208
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Keyword(s):
2009 ◽
2002 ◽
Vol 33
(4)
◽
pp. 1051-1056
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Keyword(s):