Measurement of a dielectric film thickness in the course of spraying

1966 ◽  
Vol 9 (5) ◽  
pp. 655-657
Author(s):  
Yu. G. Yagola ◽  
V. E. Minaichev
Vacuum ◽  
1995 ◽  
Vol 46 (2) ◽  
pp. 199-201 ◽  
Author(s):  
OS Heavens ◽  
GJ Kopek ◽  
Yuan Yi-Fang

2016 ◽  
Vol 4 (3) ◽  
Author(s):  
Arvind Pattabhiraman ◽  
Deepak Marla ◽  
Shiv G. Kapoor

A computational model to investigate the flushing of electric discharge machining (EDM) debris from the interelectrode gap during the spray-EDM process is developed. Spray-EDM differs from conventional EDM in that an atomized dielectric spray is used to generate a thin film that penetrates the interelectrode gap. The debris flushing in spray-EDM is investigated by developing models for three processes, viz., dielectric spray formation, film formation, and debris flushing. The range of spray system parameters including gas pressure and impingement angle that ensure formation of dielectric film on the surface is identified followed by the determination of dielectric film thickness and velocity. The debris flushing in conventional EDM with stationary dielectric and spray-EDM processes is then compared. It is observed that the dielectric film thickness and velocity play a significant role in removing the debris particles from the machining region. The model is used to determine the spray conditions that result in enhanced debris flushing with spray-EDM.


Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 1025 ◽  
Author(s):  
Vasiliki Prifti ◽  
Antigoni Siaraka ◽  
Aikaterini Giannouli ◽  
Apostolos Segkos ◽  
Achilleas Bardakas ◽  
...  

In this work we investigate the triboelectric properties of Carbon Quantum Dots (CQDs) films for potential application in triboelectric generators. CQDs were deposited on silicon wafers, using spin on techniques. Device performance was estimated in sliding mode experiments, where the CQDs-surface was sliding on top of a flexible substrate. The triboelectric signal as well as the charging of capacitors, after signal rectification, was monitored as a function of time. Our results indicate that surface roughness plays a very important role in the triboelectric signal and could compensate opposite trends due to other parameters, such as the dielectric film thickness.


1992 ◽  
Author(s):  
David Willenborg ◽  
Susan M. Kelso ◽  
Jon L. Opsal ◽  
Jeffrey T. Fanton ◽  
Allan Rosencwaig

2021 ◽  
Author(s):  
Jonathan Scholl ◽  
Nick Darby ◽  
Josh Baur ◽  
Yash Patel ◽  
Isabel Boona ◽  
...  

Abstract The integrated circuit (IC) delayering workflow is heavily reliant on operator experience to determine the processing end point, which is the ideal point on an IC where processing should be terminated, to optimize region of interest imaging. The current method of end point detection during IC delayering utilizes qualitative correlation between dielectric film color and dielectric thickness observed via optical microscopy to guide decision making. The goal of this work is to quantify this relationship using computer vision. In the field of computer vision, convolutional neural networks (CNNs) have been successfully applied to capture spatial relationships within images. Given this success, a CNN was trained for thickness estimates of dielectric films using optical images captured during processing for eventual automated end point detection. The trained model explained 39% of the variance in dielectric film thickness with a mean absolute error of approximately 47 nm.


1997 ◽  
Vol 475 ◽  
Author(s):  
X.S. Miao ◽  
Y.C. Chan ◽  
Y.M. Huang ◽  
W.Z. Liu ◽  
Z.Y. Lee

ABSTRACTThe magnetic interaction of magneto-optical multilayer films have been analyzed using the stress mechanism of coercivity and the single ion model of magnetic anisotropy. The relation between the magnetic properties of the multilayer films and the dielectric film thickness has been explained.


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