Acetone and the precursor ligand acetylacetone: distinctly different electron beam induced decomposition?

2015 ◽  
Vol 17 (2) ◽  
pp. 1204-1216 ◽  
Author(s):  
Jonas Warneke ◽  
Willem F. Van Dorp ◽  
Petra Rudolf ◽  
Michal Stano ◽  
Peter Papp ◽  
...  

The electron-induced reactions of acetylacetone and acetone reveal why organic material is retained in electron beam induced deposition from acetylacetonate precursors.

2018 ◽  
Vol 20 (8) ◽  
pp. 5644-5656 ◽  
Author(s):  
Rachel M. Thorman ◽  
Ilyas Unlu ◽  
Kelsea Johnson ◽  
Ragnar Bjornsson ◽  
Lisa McElwee-White ◽  
...  

Low energy electron-induced decomposition of a potential bimetallic nanofabrication precursor is studied in gas-phase, at surfaces and by quantum chemical calculations.


2017 ◽  
Vol 19 (20) ◽  
pp. 13264-13271 ◽  
Author(s):  
Rachel M. Thorman ◽  
Joseph A. Brannaka ◽  
Lisa McElwee-White ◽  
Oddur Ingólfsson

Low energy electron induced fragmentation of (η3-C3H5)Ru(CO)3Br is reported in relation to the suitability of different ligands in the design of focused electron beam induced deposition precursors.


2014 ◽  
Vol 23 (8) ◽  
pp. 088111 ◽  
Author(s):  
Jing-Yue Fang ◽  
Shi-Qiao Qin ◽  
Xue-Ao Zhang ◽  
Dong-Qing Liu ◽  
Sheng-Li Chang

2008 ◽  
Vol 14 (S2) ◽  
pp. 242-243
Author(s):  
P Kruit ◽  
W van Dorp ◽  
K Hagen ◽  
PA Crozier

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008


2018 ◽  
Vol 9 ◽  
pp. 1220-1227 ◽  
Author(s):  
Caspar Haverkamp ◽  
George Sarau ◽  
Mikhail N Polyakov ◽  
Ivo Utke ◽  
Marcos V Puydinger dos Santos ◽  
...  

A fluorine free copper precursor, Cu(tbaoac)2 with the chemical sum formula CuC16O6H26 is introduced for focused electron beam induced deposition (FEBID). FEBID with 15 keV and 7 nA results in deposits with an atomic composition of Cu:O:C of approximately 1:1:2. Transmission electron microscopy proved that pure copper nanocrystals with sizes of up to around 15 nm were dispersed inside the carbonaceous matrix. Raman investigations revealed a high degree of amorphization of the carbonaceous matrix and showed hints for partial copper oxidation taking place selectively on the surfaces of the deposits. Optical transmission/reflection measurements of deposited pads showed a dielectric behavior of the material in the optical spectral range. The general behavior of the permittivity could be described by applying the Maxwell–Garnett mixing model to amorphous carbon and copper. The dielectric function measured from deposited pads was used to simulate the optical response of tip arrays fabricated out of the same precursor and showed good agreement with measurements. This paves the way for future plasmonic applications with copper-FEBID.


2015 ◽  
Vol 26 (47) ◽  
pp. 475701 ◽  
Author(s):  
F Porrati ◽  
M Pohlit ◽  
J Müller ◽  
S Barth ◽  
F Biegger ◽  
...  

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