Quantitative determination of oxygen in silicon by combination of FTIR-spectroscopy, inert gas fusion analysis and secondary ion mass spectroscopy

1989 ◽  
Vol 333 (4-5) ◽  
pp. 576-582 ◽  
Author(s):  
G. Stingeder ◽  
S. Gara ◽  
S. Pahlke ◽  
H. Schwenk ◽  
E. Guerrero ◽  
...  
2003 ◽  
Vol 164 (3-4) ◽  
pp. 149-158 ◽  
Author(s):  
A.V. Berenov ◽  
S.R. Foltyn ◽  
C.W. Schneider ◽  
P.A. Warburton ◽  
J.L. MacManus-Driscoll

1991 ◽  
Vol 77 (11) ◽  
pp. 2021-2026 ◽  
Author(s):  
Kaoru SASAKAWA ◽  
Tadashi TOYODA ◽  
Sumio NAKAZAWA ◽  
Gennai NORIO

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