Spatially resolved laser-induced fluorescence and optical emission spectroscopy of carbon tetrachloride glow discharges

1983 ◽  
Vol 3 (2) ◽  
pp. 193-218 ◽  
Author(s):  
Richard A. Gottscho ◽  
Glenn P. Davis ◽  
Randolph H. Burton
Keyword(s):  
Carbon Tetrachloride ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Laser Induced Fluorescence ◽  
Spatially Resolved ◽  
Glow Discharges

Spatial Generation Profiles of Active Radicals in Plasma-Enhanced CVD Of a-Si:H

1989 ◽  
Vol 165 ◽  
Author(s):  
D. Mataras ◽  
S. Cavadias ◽  
D. Rapakoulias
Keyword(s):  
Excited States ◽  
Ground State ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Simultaneous Detection ◽  
Optical Emission ◽  
Laser Induced Fluorescence ◽  
Plasma Enhanced Cvd ◽  
Spatially Resolved ◽  
Kinetic Calculations

AbstractSpatially resolved Laser Induced Fluorescence and Optical Emission Spectroscopy were applied in an rf silane discharge, for the simultaneous detection of both ground and excited states of SiH radicals. Axial intensity profiles of these radicals were recorded under various conditions. The experimental observations indicate that the two radicals have different generation paths. LIF profiles are considered to represent the generation profile of all the ground state radicals and they were used as such in kinetic calculations.

Optical emission spectroscopy of rf glow discharges of methane–silane mixtures

1998 ◽  
Vol 317 (1-2) ◽  
pp. 120-123 ◽  
Author(s):  
J.L Andújar ◽  
E Pascual ◽  
G Viera ◽  
E Bertran
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Glow Discharges

Study of the structure in rf glow discharges in SiH4/H2by spatiotemporal optical emission spectroscopy: Influence of negative ions

1990 ◽  
Vol 68 (11) ◽  
pp. 5532-5539 ◽  
Author(s):  
Fumiyoshi Tochikubo ◽  
Akira Suzuki ◽  
Shigeru Kakuta ◽  
Yuko Terazono ◽  
Toshiaki Makabe
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Negative Ions ◽  
Optical Emission ◽  
Glow Discharges

Spatially Resolved Optical Emission Spectroscopy of a Helium Plasma Jet and its Effects on Wound Healing Rate in a Diabetic Murine Model

2014 ◽  
Vol 4 (1-4) ◽  
pp. 177-191 ◽  
Author(s):  
Marc C. Jacofsky ◽  
Cheri Lubahn ◽  
Courtney McDonnell ◽  
Yohan Seepersad ◽  
Gregory Fridman ◽  
...  
Keyword(s):  
Wound Healing ◽  
Murine Model ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Healing Rate ◽  
Optical Emission ◽  
Plasma Jet ◽  
Helium Plasma ◽  
Spatially Resolved ◽  
Wound Healing Rate

Selective Grafting of Amine Groups on Polyethylene by Means of Modulated RF NH3 Plasmas

1998 ◽  
Vol 544 ◽  
Author(s):  
M. Creatore ◽  
G. Cicala ◽  
P. Favia ◽  
R. Lamendola ◽  
R. d'Agostno
Keyword(s):  
Electron Spectroscopy ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Surface Composition ◽  
Optical Emission ◽  
Active Species ◽  
Time Resolved ◽  
Glow Discharges ◽  
Before And After ◽  
Amine Groups

AbstractPlasma treatments in power modulated NH3 RF glow discharges have been performed for modifying the surface of polyethylene (PE). Time Resolved Optical Emission Spectroscopy (TR-OES) has been utilized for monitoring the emission of active species during the modulation period of the discharge, Electron Spectroscopy for Chemical Analysis (ESCA) has been used for studying the surface composition of PE before and after the derivatization of plasmagrafted -NH2 groups. We present our preliminary results here, which show how modulated NH3 plasmas can effectively improve the grafting selectivity of -NH2 respect to all other N-containing groups.

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