scholarly journals Evaluation of the Sputtered Copper Atomic Density and its Dependence on Target-Substrate Distance by Spatially Resolved Optical Emission Spectroscopy

Shinku ◽  
2004 ◽  
Vol 47 (3) ◽  
pp. 277-280 ◽  
Author(s):  
Koji TANAKA ◽  
Takeo NAKANO ◽  
Shigeru BABA
2014 ◽  
Vol 4 (1-4) ◽  
pp. 177-191 ◽  
Author(s):  
Marc C. Jacofsky ◽  
Cheri Lubahn ◽  
Courtney McDonnell ◽  
Yohan Seepersad ◽  
Gregory Fridman ◽  
...  

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