scholarly journals Isotope Effect of H–/D– Volume Production in Low-Pressure H2/D2 Plasmas– Measurement of VUV Emissions and Negative Ion Densities

2004 ◽  
Vol 44 (56) ◽  
pp. 516-522 ◽  
Author(s):  
O. Fukumasa ◽  
S. Mori ◽  
N. Nakada ◽  
Y. Tauchi ◽  
M. Hamabe ◽  
...  
Keyword(s):  
Isotope Effect ◽  
Low Pressure ◽  
Negative Ion ◽  
Volume Production

Global model analysis of negative ion generation in low-pressure inductively coupled hydrogen plasmas with bi-Maxwellian electron energy distributions

2015 ◽  
Vol 22 (3) ◽  
pp. 033506 ◽  
Author(s):  
Sung-Ryul Huh ◽  
Nam-Kyun Kim ◽  
Bong-Ki Jung ◽  
Kyoung-Jae Chung ◽  
Yong-Seok Hwang ◽  
...  
Keyword(s):  
Electron Energy ◽  
Low Pressure ◽  
Model Analysis ◽  
Global Model ◽  
Negative Ion ◽  
Energy Distributions ◽  
Inductively Coupled ◽  
Hydrogen Plasmas ◽  
Ion Generation
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