Global model analysis of negative ion generation in low-pressure inductively coupled hydrogen plasmas with bi-Maxwellian electron energy distributions

2015 ◽  
Vol 22 (3) ◽  
pp. 033506 ◽  
Author(s):  
Sung-Ryul Huh ◽  
Nam-Kyun Kim ◽  
Bong-Ki Jung ◽  
Kyoung-Jae Chung ◽  
Yong-Seok Hwang ◽  
...  
Keyword(s):  
Electron Energy ◽  
Low Pressure ◽  
Model Analysis ◽  
Global Model ◽  
Negative Ion ◽  
Energy Distributions ◽  
Inductively Coupled ◽  
Hydrogen Plasmas ◽  
Ion Generation

Global model analysis of Ar inductively coupled plasma driven by a 150 kHz-band high-power pulse burst

2019 ◽  
Vol 58 (SA) ◽  
pp. SAAB06
Author(s):  
Yuma Saito ◽  
Kodai Shibata ◽  
Katsuyuki Takahashi ◽  
Seiji Mukaigawa ◽  
Koichi Takaki ◽  
...  
Keyword(s):  
High Power ◽  
Inductively Coupled Plasma ◽  
Model Analysis ◽  
Global Model ◽  
Pulse Burst ◽  
Inductively Coupled ◽  
Power Pulse ◽  
High Power Pulse

Global model and diagnostic of a low-pressure SF6/Ar inductively coupled plasma

2009 ◽  
Vol 18 (2) ◽  
pp. 025001 ◽  
Author(s):  
L Lallement ◽  
A Rhallabi ◽  
C Cardinaud ◽  
M C Peignon-Fernandez ◽  
L L Alves
Keyword(s):  
Inductively Coupled Plasma ◽  
Low Pressure ◽  
Global Model ◽  
Inductively Coupled

Tailoring of electron energy distributions in low-pressure inductive discharges

1999 ◽  
Vol 74 (3) ◽  
pp. 338-340 ◽  
Author(s):  
F. A. Haas ◽  
N. St. J. Braithwaite
Keyword(s):  
Electron Energy ◽  
Low Pressure ◽  
Energy Distributions
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