scholarly journals Isotope Effect of H−/D− Volume Production in Low-Pressure H2/D2 Plasmas — Negative Ion Densities versus Plasma Parameters

2005 ◽  
Author(s):  
Osamu Fukumasa
Keyword(s):  
Isotope Effect ◽  
Low Pressure ◽  
Negative Ion ◽  
Plasma Parameters ◽  
Volume Production

scholarly journals Isotope Effect of H–/D– Volume Production in Low-Pressure H2/D2 Plasmas– Measurement of VUV Emissions and Negative Ion Densities

2004 ◽  
Vol 44 (56) ◽  
pp. 516-522 ◽  
Author(s):  
O. Fukumasa ◽  
S. Mori ◽  
N. Nakada ◽  
Y. Tauchi ◽  
M. Hamabe ◽  
...  
Keyword(s):  
Isotope Effect ◽  
Low Pressure ◽  
Negative Ion ◽  
Volume Production

scholarly journals Numerical simulation of the plasma parameters of a low-pressure arc discharge in helium

2018 ◽  
Vol 1128 ◽  
pp. 012119
Author(s):  
A V Fedoseev ◽  
N A Demin ◽  
S Z Sakhapov ◽  
A V Zaikovskii ◽  
D V Smovzh
Keyword(s):  
Numerical Simulation ◽  
Arc Discharge ◽  
Low Pressure ◽  
Plasma Parameters

Optimizing the plasma parameters of a low-pressure coaxial discharge

Vacuum ◽  
2004 ◽  
Vol 76 (2-3) ◽  
pp. 393-396 ◽  
Author(s):  
Z. Neichev ◽  
E. Benova
Keyword(s):  
Low Pressure ◽  
Plasma Parameters

scholarly journals Effect of DC Biased Voltage and Ion Temperature on Bounded Ion-Ion Plasma

2020 ◽  
Vol 25 (1) ◽  
pp. 61-67
Author(s):  
Anish Maskey ◽  
Atit Deuja ◽  
Suresh Basnet ◽  
Raju Khanal
Keyword(s):  
Electric Field ◽  
Strong Electric Field ◽  
Negative Ions ◽  
Simulation Method ◽  
Negative Ion ◽  
Ion Temperature ◽  
Plasma Parameters ◽  
Degree Of Ionization ◽  
Particle In Cell ◽  
Ion Plasma

 A one dimensional particle-in-cell (PIC) simulation method has been employed to study the effect of DC voltage and ion temperature on the properties of ion-ion plasma bounded by two symmetrical but oppositely biased electrodes. It is assumed that the ion-ion plasma is collisionless and both the positive and negative ion species have the same mass, temperature, and degree of ionization. Simulation results show that the formation of sheath and presheath regions and fluctuation of plasma parameters in that region are affected by the biasing voltage and ion temperature. It was found that the magnitude of the electrostatic electric field at the vicinity of biasing electrodes was affected by the biasing voltage and ion temperature as well. This strong electric field close to the electrodes further prevents the flow of charged particles towards the electrodes. The presence of a non-zero electric field at the quasineutral region suggests a presheath region similar to the electron-ion plasma. In the quasineutral region, the density of ions increased with the increase in biasing voltage and decreased with the increase in temperature of isothermal ions. Furthermore, the phase space diagrams for the ions were obtained which indicated different regions of the plasma. The positive ions acquire negative velocity towards the negatively biased electrode and the negative ions acquire positive velocity towards the positively biased electrode.

Space Potential and Ion Energies in a Low Pressure Discharge Containing at least Two Negative Species

1988 ◽  
Vol 117 ◽  
Author(s):  
S G Ingram ◽  
N St J Braithwaite
Keyword(s):  
Energy Distribution ◽  
Collisionless Plasma ◽  
Negative Ions ◽  
Potential Drop ◽  
Low Pressure ◽  
Type Model ◽  
Plasma Parameters ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Positive Ion

AbstractA Tonks-Langmuir type model for a one-dimensional low pressure (collisionless) plasma containing at least two species of Maxwellian negative charge carriers is examined. The solutions of this model yield the positive ion energy distribution at the sheath edge without needing to specify the ionization process. This distribution has a width consistent with the potential drop across the plasma, and is shown to satisfy the generalised Bohm criterion for sheath formation. However by assuming a form for the ionization rate in the plasma, the potential profile across the discharge has been calculated. It has been found that for a range of plasma parameters the solution for the potential at which quasineutrality fails becomes triple valued; the physical solution in this regime is identified.Many plasmas used for materials processing contain negative ions. It is important to understand how these ions influence the positive ion energy distribution at the substrate where the processing occurs.This work is also of relevance to the behaviour of Langmuir probes in electronegative plasmas.

An experimental study of the plasma parameters of a hybrid low-pressure RF discharge

2012 ◽  
Vol 67 (1) ◽  
pp. 97-101 ◽  
Author(s):  
K. V. Vavilin ◽  
M. A. Gomorev ◽  
E. A. Kralkina ◽  
P. A. Nekludova ◽  
V. B. Pavlov ◽  
...  
Keyword(s):  
Experimental Study ◽  
Low Pressure ◽  
Rf Discharge ◽  
Plasma Parameters
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