Application of aberration corrected low voltage SEM for metrology

2019 ◽  
Author(s):  
Zhaohui Cheng ◽  
Hideto Dohi ◽  
Shingo Hayashi ◽  
Kotoko Hirose ◽  
Hideyuki Kazumi
Keyword(s):  
Low Voltage ◽  
Aberration Corrected

scholarly journals Advantages of Monochromated Low Voltage Aberration Corrected TEM

2010 ◽  
Vol 16 (S2) ◽  
pp. 118-119
Author(s):  
DC Bell ◽  
C Russo ◽  
S Meyer ◽  
G Benner ◽  
M Haider
Keyword(s):  
Low Voltage ◽  
Aberration Corrected

Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

scholarly journals Aberration Corrected STEM in Atomic Resolution and Resolution Enhancement in Low-Voltage Microscope

Hyomen Kagaku ◽  
2013 ◽  
Vol 34 (5) ◽  
pp. 240-246
Author(s):  
Hidetaka SAWADA ◽  
Takeo SASAKI ◽  
Eiji OKUNISHI ◽  
Kazutomo SUENAGA
Keyword(s):  
Low Voltage ◽  
Resolution Enhancement ◽  
Atomic Resolution ◽  
Aberration Corrected Stem ◽  
Aberration Corrected

Electrostatic Aberration Correction in LV-SEM

2000 ◽  
Vol 6 (S2) ◽  
pp. 746-747 ◽  
Author(s):  
D.J. Maas ◽  
A. Henstra ◽  
M.P.C.M. Krijn ◽  
S.A.M. Mentink
Keyword(s):  
Electron Microscope ◽  
Low Voltage ◽  
State Of The Art ◽  
Spherical Aberration ◽  
Positive Definite ◽  
Ease Of Use ◽  
Objective Lens ◽  
Time Varying ◽  
Voltage Electron ◽  
Aberration Corrected

The resolution of a low-voltage electron microscope is limited by the chromatic and spherical aberration of the objective lens, see Fig. 1. The design of state-of-the-art objective lenses is optimised for minimal aberrations. Any significant improvement of the resolution requires an aberration corrector. Recently, correction of both Cc and Cs has been demonstrated in SEM, using a combination of magnetic and electrostatic quadrupoles and octupoles (Zach and Haider, 1995). The present paper presents an alternative design, which is based on a purely electrostatic concept, potentially simplifying the ease-of-use of an aberration corrected microscope.In 1936 Scherzer showed that the fundamental lens aberrations of round lenses are positive definite, in absence of time-varying fields and/or space charge. Negative lens aberrations, required for the correction of Cc and Cs, can only be obtained using non-round lenses, e.g. quadrupoles and octupoles (Scherzer, 1947).

scholarly journals Resolution Improvement in Aberration-Corrected Low- Voltage TEM with Monochromator at 60 kV

2015 ◽  
Vol 644 ◽  
pp. 012033
Author(s):  
S Morishita ◽  
M Mukai ◽  
T Sasaki ◽  
K Suenaga ◽  
H Sawada
Keyword(s):  
Low Voltage ◽  
Resolution Improvement ◽  
Aberration Corrected

Design of an aberration corrected low-voltage SEM

2010 ◽  
Vol 110 (11) ◽  
pp. 1411-1419 ◽  
Author(s):  
R.H. van Aken ◽  
D.J. Maas ◽  
C.W. Hagen ◽  
J.E. Barth ◽  
P. Kruit
Keyword(s):  
Low Voltage ◽  
Aberration Corrected

scholarly journals Probing The Mechanical Properties of Few-Layer Graphene with Aberration-Corrected, Low-Voltage STEM

2019 ◽  
Vol 25 (S2) ◽  
pp. 1730-1731
Author(s):  
Edmund Han ◽  
Jaehyung Yu ◽  
Kayla Nguyen ◽  
Elif Ertekin ◽  
Arend van der Zande ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Low Voltage ◽  
Layer Graphene ◽  
Few Layer Graphene ◽  
Aberration Corrected

scholarly journals Low-Voltage (40 kV) Aberration-Corrected, Monochromated, Imaging for Carbon Nanostructures

2011 ◽  
Vol 17 (S2) ◽  
pp. 1490-1491 ◽  
Author(s):  
D Bell ◽  
D Kolmykov ◽  
C Russo
Keyword(s):  
Carbon Nanostructures ◽  
Low Voltage ◽  
Aberration Corrected

Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

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