capacitive displacement transducer
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Micromachines ◽  
2019 ◽  
Vol 10 (6) ◽  
pp. 380 ◽  
Author(s):  
Kang Rao ◽  
Xiaoli Wei ◽  
Shaolin Zhang ◽  
Mengqi Zhang ◽  
Chenyuan Hu ◽  
...  

This paper presents a micromachined micro-g capacitive accelerometer with a silicon-based spring-mass sensing element. The displacement changes of the proof mass are sensed by an area-variation-based capacitive displacement transducer that is formed by the matching electrodes on both the movable proof mass die and the glass cover plate through the flip-chip packaging. In order to implement a high-performance accelerometer, several technologies are applied: the through-silicon-wafer-etching process is used to increase the weight of proof mass for lower thermal noise, connection beams are used to reduce the cross-sensitivity, and the periodic array area-variation capacitive displacement transducer is applied to increase the displacement-to-capacitance gain. The accelerometer prototype is fabricated and characterized, demonstrating a scale factor of 510 mV/g, a noise floor of 2 µg/Hz1/2 at 100 Hz, and a bias instability of 4 µg at an averaging time of 1 s. Experimental results suggest that the proposed MEMS capacitive accelerometer is promising to be used for inertial navigation, structural health monitoring, and tilt measurement applications.


IEEE Access ◽  
2019 ◽  
Vol 7 ◽  
pp. 153650-153659
Author(s):  
Qiu Wang ◽  
Shitao Yan ◽  
Qiangwei Xu ◽  
Shaolin Zhang ◽  
Xiaoxiao Song ◽  
...  

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