The thin dielectric film capacitive displacement transducer to nanometer
2001 ◽
Vol 50
(1)
◽
pp. 106-110
◽
Keyword(s):
2015 ◽
Vol 54
(6S2)
◽
pp. 06GB05
◽
2017 ◽
Vol 693
◽
pp. 1164-1173
◽
1990 ◽
Vol 74
(4)
◽
pp. 275-279
◽
Keyword(s):