Research on fusion measurement technology of capacitive displacement transducer and grating
1989 ◽
Vol 38
(4)
◽
pp. 870-875
◽
1990 ◽
Vol 39
(5)
◽
pp. 735-738
◽
2002 ◽
Vol 10.2
(0)
◽
pp. 545-550
◽
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