Microlithography
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Published By CRC Press

9780824790240, 9781420051537
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Optics for Photolithography

2007 ◽  
pp. 149-242 ◽  
Author(s):  
Bruce Smith

Chemistry of Photoresist Materials

2007 ◽  
pp. 503-586 ◽  
Author(s):  
Takumi Ueno ◽  
Robert Allen

Alignment and Overlay

2007 ◽  
pp. 287-328
Author(s):  
Gregg Gallatin

Electron Beam Nanolithography

2007 ◽  
pp. 799-836 ◽  
Author(s):  
Elizabeth Dobisz ◽  
Zvonimir Bandi_ ◽  
Martin Peckerar
Keyword(s):  
Electron Beam

X-ray Lithography

2007 ◽  
pp. 361-382
Author(s):  
Takumi Ueno
Keyword(s):  
X Ray

Multilayer Resist Technology

2007 ◽  
pp. 637-674
Author(s):  
Maureen Hanratty ◽  
Bruce Smith
Keyword(s):  
Multilayer Resist
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