Influence of Cross Section Thickness and Aspect Ratio on Deformation during Diffusion Bonding and Impact of Metal Diffusion and Evaporation on Temperature Measurement Accuracy

Diffusion bonding is often used on pre-machined parts to generate internal cavities, e.g. for cooling injection molding tools close to the mold cavity. Only then, the workpieces are finished to their final dimensions. In the case of micro-process devices, however, it is essential to precisely control the deformation, as otherwise uncontrollable pressure losses will occur with channel cross-sections in the sub-millimeter range. Post-processing is not possible. The most important process parameters for diffusion bonding are temperature, dwell time and contact pressure, with the bonding temperature and contact pressure acting in opposite directions and showing a strong non-linear dependence on deformation. In addition, the deformation is influenced by a number of other factors such as the absolute size of the cross-section and the aspect ratio of the parts, the dimensions and distribution of the internal cross sections and the overall percentage of the cross-section to be bonded. In micro process engineering, small material cross-sections in the range of the materials microstructure can facilitate additional deformation mechanisms such as grain boundary sliding, which are not relevant at all for larger structures. For parts consisting of multiple layers, tolerances in thickness and roughness of multiple surfaces must be levelled, contributing to the percentaged deformation. This makes it difficult, especially in micro process engineering and in single or small series production, to determine suitable joining parameters in advance, which on the one hand do not cause unforeseen large deformations, but on the other hand reliably produce highly vacuum-tight components. Hence, a definition of a fixed percentaged deformation does not work for all kinds of components. This makes it difficult to specify parameters for surely obtain high-vacuum tight parts. For successful diffusion bonding, atoms must diffuse over the bonding planes, forming a monolithic part in which the original layers are no longer visible. Only then, mechanical properties identical to those of the base material, which has been subjected to identical heat treatment, can be achieved. In this paper, the impacts of different material cross section widths as well as of the aspect ratio on deformation were investigated. By accident, it was found that also accuracy of the temperature measurement may have a serious impact in terms of deformation.

Non-Invasive Temperature Measurement for Polyimid-Based Microstructured Devices

Besides the common benefits of micro-structured reactors such as enhanced mass and heat transfer caused by a high specific surface and enhanced mixing, they have also drawbacks due to their tiny dimensions. Non-invasive temperature measurement is an important issue for micro process engineering regarding to process control and safety issues. High resolution and robustness are requirements which should be met by the temperature measuring method. Thin film technology combines the possibility to manufacture micro scaled structures with great flexibility in choosing material and geometry of the structures. Layers of aluminum with a thickness in nanometer range are deposited on flexible polyimide foil and structured lithographically to obtain electrical conductor tracks which are used as temperature sensors based on their electrical resistance. The produced temperature sensors were calibrated in the range from 20 to 70 °C and the accuracy of the sensors was checked.

Intensified LOHC-Dehydrogenation Using Multi-Stage Microstructures and Pd-Based Membranes

Liquid organic hydrogen carriers (LOHC) are able to store hydrogen stably and safely in liquid form. The carrier can be loaded or unloaded with hydrogen via catalytic reactions. However, the release reaction brings certain challenges. In addition to an enormous heat requirement, the released hydrogen is contaminated by traces of evaporated LOHC and by-products. Micro process engineering offers a promising approach to meet these challenges. In this paper, a micro-structured multi-stage reactor concept with an intermediate separation of hydrogen is presented for the application of perhydro-dibenzyltoluene dehydrogenation. Each reactor stage consists of a micro-structured radial flow reactor designed for multi-phase flow of LOHC and released hydrogen. The hydrogen is separated from the reactors’ gas phase effluent via PdAg-membranes, which are integrated into a micro-structured environment. Separate experiments were carried out to describe the kinetics of the reaction and the separation ability of the membrane. A model was developed, which was fed with these data to demonstrate the influence of intermediate separation on the efficiency of LOHC dehydrogenation.