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Recent Research Progress of Carbon Nanotube Arrays Prepared by Plasma Enhanced Chemical Vapor Deposition Method

2016 ◽  
Vol 852 ◽  
pp. 308-314
Author(s):  
Er Xiong Ding ◽  
Hong Zhang Geng ◽  
Li He Mao ◽  
Wen Yi Wang ◽  
Yan Wang ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Carbon Nanotube ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Research Progress ◽  
Chemical Vapor Deposition Method ◽  
In Situ Fabrication ◽  
Microwave Pecvd ◽  
Cnt Arrays ◽  
The Moment

Preparing carbon nanotube (CNT) arrays by plasma enhanced chemical vapor deposition (PECVD) method can dramatically reduce the deposition temperature, which makes it possible for in-situ fabrication of CNT-based nanoelectronic devices. In this paper, up to date research progress of CNT arrays prepared by PECVD method was presented, including radio frequency PECVD, direct current PECVD and microwave PECVD. Then, morphology and quality of CNT arrays were compared. In the end, we analyzed the possible challenges encountered through CNT array preparation by PECVD method at the moment and in the future.

scholarly journals Synthesis of Carbon Nanowalls by Microwave PECVD for Battery Electrode

2015 ◽  
Vol 16 (4) ◽  
pp. 198-200 ◽  
Author(s):  
Sung Yun Kim ◽  
Seung Kwon Shin ◽  
Hyungchul Kim ◽  
Yeun-Ho Jung ◽  
Hyunil Kang ◽  
...  
Keyword(s):  
Battery Electrode ◽  
Microwave Pecvd ◽  
Carbon Nanowalls

scholarly journals Syntesis of Carbon Nanostructures Near Room Temperature Using Microwave PECVD

2015 ◽  
Vol 18 (4) ◽  
pp. 860-866 ◽  
Author(s):  
Flavio Henrique Oliveira Carvalho ◽  
Alfredo Rodrigues Vaz ◽  
Stanislav Moshkalev ◽  
Rogério Valentim Gelamo
Keyword(s):  
Carbon Nanostructures ◽  
Room Temperature ◽  
Microwave Pecvd

Microwave PECVD Silicon Carbonitride Thin Films: A FTIR and Ellipsoporosimetry Study

2015 ◽  
Vol 13 (2) ◽  
pp. 258-265 ◽  
Author(s):  
Mathias Haacké ◽  
Romain Coustel ◽  
Vincent Rouessac ◽  
Stéphanie Roualdès ◽  
Anne Julbe
Keyword(s):  
Thin Films ◽  
Silicon Carbonitride ◽  
Microwave Pecvd

Variations in graded organosilicone microwave PECVD coatings modify stress and improve the durability on plastic substrates

2014 ◽  
Vol 259 ◽  
pp. 616-624 ◽  
Author(s):  
Colin J. Hall ◽  
Peter J. Murphy ◽  
Torsten Schmauder ◽  
Hans J. Griesser
Keyword(s):  
Plastic Substrates ◽  
Microwave Pecvd

Substrate temperature effect on the growth of carbon nanowalls synthesized via microwave PECVD

2014 ◽  
Vol 58 ◽  
pp. 112-116 ◽  
Author(s):  
Sung Yun Kim ◽  
Won Seok Choi ◽  
Jae-Hyeoung Lee ◽  
Byungyou Hong
Keyword(s):  
Substrate Temperature ◽  
Temperature Effect ◽  
Microwave Pecvd ◽  
Carbon Nanowalls
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