microwave pecvd
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2016 ◽  
Vol 852 ◽  
pp. 308-314
Author(s):  
Er Xiong Ding ◽  
Hong Zhang Geng ◽  
Li He Mao ◽  
Wen Yi Wang ◽  
Yan Wang ◽  
...  

Preparing carbon nanotube (CNT) arrays by plasma enhanced chemical vapor deposition (PECVD) method can dramatically reduce the deposition temperature, which makes it possible for in-situ fabrication of CNT-based nanoelectronic devices. In this paper, up to date research progress of CNT arrays prepared by PECVD method was presented, including radio frequency PECVD, direct current PECVD and microwave PECVD. Then, morphology and quality of CNT arrays were compared. In the end, we analyzed the possible challenges encountered through CNT array preparation by PECVD method at the moment and in the future.


2015 ◽  
Vol 16 (4) ◽  
pp. 198-200 ◽  
Author(s):  
Sung Yun Kim ◽  
Seung Kwon Shin ◽  
Hyungchul Kim ◽  
Yeun-Ho Jung ◽  
Hyunil Kang ◽  
...  

2015 ◽  
Vol 18 (4) ◽  
pp. 860-866 ◽  
Author(s):  
Flavio Henrique Oliveira Carvalho ◽  
Alfredo Rodrigues Vaz ◽  
Stanislav Moshkalev ◽  
Rogério Valentim Gelamo

2015 ◽  
Vol 13 (2) ◽  
pp. 258-265 ◽  
Author(s):  
Mathias Haacké ◽  
Romain Coustel ◽  
Vincent Rouessac ◽  
Stéphanie Roualdès ◽  
Anne Julbe

2014 ◽  
Vol 259 ◽  
pp. 616-624 ◽  
Author(s):  
Colin J. Hall ◽  
Peter J. Murphy ◽  
Torsten Schmauder ◽  
Hans J. Griesser

2014 ◽  
Vol 58 ◽  
pp. 112-116 ◽  
Author(s):  
Sung Yun Kim ◽  
Won Seok Choi ◽  
Jae-Hyeoung Lee ◽  
Byungyou Hong

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