Influence of Tetramethyldisiloxane-Oxygen Mixtures on the Physical Properties of Microwave PECVD Coatings and Subsequent Post-Plasma Reactions
2014 ◽
Vol 12
(6)
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pp. 555-563
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1976 ◽
Vol 32
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pp. 365-377
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1969 ◽
Vol 27
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pp. 372-373
1988 ◽
Vol 46
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pp. 1012-1015
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1982 ◽
Vol 85
(1)
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pp. 257-263
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2020 ◽
Vol 149
(12)
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pp. 2332-2343
1980 ◽
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