Cross Sectional Passive Voltage Contrast Approach for Gate Oxide Breakdown Defect Isolation and Visualization for TEM Analysis

Gate oxide breakdown has always been a critical reliability issue in Complementary Metal-Oxide-Silicon (CMOS) devices. Pinhole analysis is one of the commonly use failure analysis (FA) technique to analysis Gate oxide breakdown issue. However, in order to have a better understanding of the root cause and mechanism, a defect physically without any damaged or chemical attacked is required by the customer and process/module departments. In other words, it is crucial to have Transmission Electron Microscopy (TEM) analysis at the exact Gate oxide breakdown point. This is because TEM analysis provides details of physical evidence and insights to the root cause of the gate oxide failures. It is challenging to locate the site for TEM analysis in cases when poly gate layout is of a complex structure rather than a single line. In this paper, we developed and demonstrated the use of cross-sectional Scanning Electron Microscope (XSEM) passive voltage contrast (PVC) to isolate the defective leaky Polysilicon (PC) Gate and subsequently prepared TEM lamella in a perpendicular direction from the post-XSEM PVC sample. This technique provides an alternative approach to identify defective leaky polysilicon Gate for subsequent TEM analysis.

Ultra-thin oxide breakdown for OTP development in power technologies

OTP (One Time Programmable) memory in power technology enables electrical performance optimization together with area occupation reduction. In this paper, the aspects relative to the oxide breakdown (which is the key mechanism for memory programmability) are studied and applied to the development of an antifuse OTP cell in a 350 nm-CMOS power technology. The physical analysis of the degradation phases of an oxide layer is presented together with the physical models, exploited to foresee the device time-to-breakdown depending on applied voltage, oxide thickness etc. The achieved results are used in the development and reliable implementation of OTP cells in the target 350 nm-CMOS node.

Design Architectures of the CMOS Power Amplifier for 2.4 GHz ISM Band Applications: An Overview

Power amplifiers (PAs) are among the most crucial functional blocks in the radio frequency (RF) frontend for reliable wireless communication. PAs amplify and boost the input signal to the required output power. The signal is amplified to make it sufficiently high for the transmitter to propagate the required distance to the receiver. Attempted advancements of PA have focused on attaining high-performance RF signals for transmitters. Such PAs are expected to require low power consumption while producing a relatively high output power with a high efficiency. However, current PA designs in nanometer and micrometer complementary metal–oxide semiconductor (CMOS) technology present inevitable drawbacks, such as oxide breakdown and hot electron effect. A well-defined architecture, including a linear and simple functional block synthesis, is critical in designing CMOS PA for various applications. This article describes the different state-of-the art design architectures of CMOS PA, including their circuit operations, and analyzes the performance of PAs for 2.4 GHz ISM (industrial, scientific, and medical) band applications.