electrochemical mechanical planarization Latest Research Papers

Electrochemical Mechanical Planarization (eCMP) of Copper Thin Films

ECS Transactions ◽

10.1149/1.2408895 ◽

2019 ◽

Vol 2 (6) ◽

pp. 417-425 ◽

Cited By ~ 3

Author(s):

Serdar Aksu ◽

Ismail Emesh ◽

Cyprian Uzoh ◽

Bulent Basol

Keyword(s):

Thin Films ◽

Electrochemical Mechanical Planarization

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REMOVAL RATE SIMULATION OF COPPER ELECTROCHEMICAL MECHANICAL PLANARIZATION

Intelligent Computing and Information Engineering (ICIE) ◽

10.26480/icie.01.2017.139.141 ◽

2017 ◽

Author(s):

Bian Yanfei ◽

Wang Zhenxuan ◽

Cai Meng ◽

Wang Ruofu ◽

Tian Jingqun

Keyword(s):

Removal Rate ◽

Electrochemical Mechanical Planarization

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5-methyl-1H-benzotriazole as potential corrosion inhibitor for electrochemical-mechanical planarization of copper

Transactions of Nonferrous Metals Society of China ◽

10.1016/s1003-6326(13)62751-x ◽

2013 ◽

Vol 23 (8) ◽

pp. 2431-2438 ◽

Cited By ~ 8

Author(s):

Yan-fei BIAN ◽

Wen-jie ZHAI ◽

Bao-quan ZHU

Keyword(s):

Corrosion Inhibitor ◽

Electrochemical Mechanical Planarization

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Synergic effect of benzotriazole and chloride ion on Cu passivation in a phosphate electrochemical mechanical planarization electrolyte

Electrochimica Acta ◽

10.1016/j.electacta.2011.01.025 ◽

2011 ◽

Vol 56 (9) ◽

pp. 3303-3310 ◽

Cited By ~ 11

Author(s):

Jeng-Yu Lin ◽

Shu-Wei Chou

Keyword(s):

Chloride Ion ◽

Synergic Effect ◽

Cu Passivation ◽

Electrochemical Mechanical Planarization

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Noncontact Copper-Electrochemical Mechanical Planarization (ECMP) Characteristics for Defect-Free Process

ECS Meeting Abstracts ◽

10.1149/ma2011-02/2/87 ◽

2011 ◽

Keyword(s):

Free Process ◽

Electrochemical Mechanical Planarization

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Voltammetric current oscillations due to general and pitting corrosion of tantalum: Implications for electrochemical–mechanical planarization

Corrosion Science ◽

10.1016/j.corsci.2010.05.031 ◽

2010 ◽

Vol 52 (9) ◽

pp. 3086-3098 ◽

Cited By ~ 19

Author(s):

Christopher M. Sulyma ◽

Dipankar Roy

Keyword(s):

Pitting Corrosion ◽

Current Oscillations ◽

Electrochemical Mechanical Planarization

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Effect of mechanical factor in uniformity for electrochemical mechanical planarization

Sensors and Actuators A Physical ◽

10.1016/j.sna.2010.07.015 ◽

2010 ◽

Vol 163 (1) ◽

pp. 433-439 ◽

Cited By ~ 5

Author(s):

Sukhoon Jeong ◽

Jaehyun Bae ◽

Hyunseop Lee ◽

Hojun Lee ◽

Youngkyun Lee ◽

...

Keyword(s):

Mechanical Factor ◽

Electrochemical Mechanical Planarization

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Hybrid Electrochemical Mechanical Planarization Process for Cu Dual-Damascene Through-Silicon Via Using Noncontact Electrode Pad

Japanese Journal of Applied Physics ◽

10.1143/jjap.49.05fg01 ◽

2010 ◽

Vol 49 (5) ◽

pp. 05FG01 ◽

Cited By ~ 11

Author(s):

Shigeru Tominaga ◽

Daisuke Abe ◽

Taro Enomoto ◽

Seiichi Kondo ◽

Hideki Kitada ◽

...

Keyword(s):

Through Silicon Via ◽

Dual Damascene ◽

Planarization Process ◽

Electrochemical Mechanical Planarization

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Adsorption–desorption study of benzotriazole in a phosphate-based electrolyte for Cu electrochemical mechanical planarization

Electrochimica Acta ◽

10.1016/j.electacta.2009.11.104 ◽

2010 ◽

Vol 55 (7) ◽

pp. 2325-2331 ◽

Cited By ~ 7

Author(s):

Jeng-Yu Lin ◽

Alan C. West

Keyword(s):

Desorption Study ◽

Adsorption Desorption ◽

Electrochemical Mechanical Planarization

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Effect of Cu-Ion Concentration in Concentrated H[sub 3]PO[sub 4] Electrolyte on Cu Electrochemical Mechanical Planarization

Journal of The Electrochemical Society ◽

10.1149/1.3425807 ◽

2010 ◽

Vol 157 (7) ◽

pp. H763 ◽

Cited By ~ 4

Author(s):

Te-Ming Kung ◽

Chuan-Pu Liu ◽

Shih-Chieh Chang ◽

Kei-Wei Chen ◽

Ying-Lang Wang

Keyword(s):

Ion Concentration ◽

Electrochemical Mechanical Planarization

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electrochemical mechanical planarization
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TOTAL DOCUMENTS

H-INDEX

Electrochemical Mechanical Planarization (eCMP) of Copper Thin Films

REMOVAL RATE SIMULATION OF COPPER ELECTROCHEMICAL MECHANICAL PLANARIZATION

5-methyl-1H-benzotriazole as potential corrosion inhibitor for electrochemical-mechanical planarization of copper

Synergic effect of benzotriazole and chloride ion on Cu passivation in a phosphate electrochemical mechanical planarization electrolyte

Noncontact Copper-Electrochemical Mechanical Planarization (ECMP) Characteristics for Defect-Free Process

Voltammetric current oscillations due to general and pitting corrosion of tantalum: Implications for electrochemical–mechanical planarization

Effect of mechanical factor in uniformity for electrochemical mechanical planarization

Hybrid Electrochemical Mechanical Planarization Process for Cu Dual-Damascene Through-Silicon Via Using Noncontact Electrode Pad

Adsorption–desorption study of benzotriazole in a phosphate-based electrolyte for Cu electrochemical mechanical planarization

Effect of Cu-Ion Concentration in Concentrated H[sub 3]PO[sub 4] Electrolyte on Cu Electrochemical Mechanical Planarization

Export Citation Format

electrochemical mechanical planarizationRecently Published Documents

TOTAL DOCUMENTS

H-INDEX

Electrochemical Mechanical Planarization (eCMP) of Copper Thin Films

REMOVAL RATE SIMULATION OF COPPER ELECTROCHEMICAL MECHANICAL PLANARIZATION

5-methyl-1H-benzotriazole as potential corrosion inhibitor for electrochemical-mechanical planarization of copper

Synergic effect of benzotriazole and chloride ion on Cu passivation in a phosphate electrochemical mechanical planarization electrolyte

Noncontact Copper-Electrochemical Mechanical Planarization (ECMP) Characteristics for Defect-Free Process

Voltammetric current oscillations due to general and pitting corrosion of tantalum: Implications for electrochemical–mechanical planarization

Effect of mechanical factor in uniformity for electrochemical mechanical planarization

Hybrid Electrochemical Mechanical Planarization Process for Cu Dual-Damascene Through-Silicon Via Using Noncontact Electrode Pad

Adsorption–desorption study of benzotriazole in a phosphate-based electrolyte for Cu electrochemical mechanical planarization

Effect of Cu-Ion Concentration in Concentrated H[sub 3]PO[sub 4] Electrolyte on Cu Electrochemical Mechanical Planarization

electrochemical mechanical planarization
Recently Published Documents