Synergic effect of benzotriazole and chloride ion on Cu passivation in a phosphate electrochemical mechanical planarization electrolyte
2011 ◽
Vol 56
(9)
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pp. 3303-3310
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2013 ◽
Vol 274
◽
pp. 471-474
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1979 ◽
Vol 44
(12)
◽
pp. 3656-3664
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