methyl silsesquioxane
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On the pyrolysis of a methyl‐silsesquioxane in reactive CO 2 atmosphere: a TG/MS and FT‐IR study

2021 ◽  
Author(s):  
Renzo Campostrini ◽  
Andrea Zambotti ◽  
Mattia Biesuz ◽  
Gian Domenico Sorarù
Keyword(s):  
Ft Ir ◽  
Methyl Silsesquioxane ◽  
Ir Study

Poly(aminopropyl/methyl)silsesquioxane microspheres improve the flowability of model waxy oils associated with asphaltenes

Fuel ◽  
2019 ◽  
Vol 243 ◽  
pp. 60-69 ◽  
Author(s):  
Fei Yang ◽  
Xiaoping Zhang ◽  
Chuanxian Li ◽  
Shutong Dai ◽  
Bo Yao ◽  
...  
Keyword(s):  
Methyl Silsesquioxane

Structure and its thickness dependence of thin films of phenyl and methyl silsesquioxane polymers

2018 ◽  
Vol 502 ◽  
pp. 128-135 ◽  
Author(s):  
YuanQiao Rao ◽  
Jeffrey Fenton ◽  
Roxanne Jenkins ◽  
Jessica Evans
Keyword(s):  
Thin Films ◽  
Thickness Dependence ◽  
Methyl Silsesquioxane

Characterization and Integration Performance of Methyl Silsesquioxane-Based Nano Porous Low-k Dielectric Films

2016 ◽  
Vol 16 (11) ◽  
pp. 11224-11228
Author(s):  
Eunmi Choi ◽  
Minwoo Nam ◽  
Areum Kim ◽  
Keunwon Kang ◽  
Longshou Zheng ◽  
...  
Keyword(s):  
Dielectric Films ◽  
Methyl Silsesquioxane ◽  
Low K

Mechanical Behavior of Methyl-Silsesquioxane Based Nano Porous Low-K Film Using by Ultraviolet Curing Method

2016 ◽  
Vol 8 (10) ◽  
pp. 1963-1967 ◽  
Author(s):  
Soon Hyeong Kwon ◽  
Eunmi Choi ◽  
Areum Kim ◽  
Keunwon Kang ◽  
Minwoo Nam ◽  
...  
Keyword(s):  
Mechanical Behavior ◽  
Ultraviolet Curing ◽  
Methyl Silsesquioxane ◽  
Curing Method ◽  
Low K

Interaction of SF6and O2plasma with porous poly phenyl methyl silsesquioxane low-κfilms

2015 ◽  
Vol 48 (12) ◽  
pp. 125201
Author(s):  
J F Cherunilam ◽  
K V Rajani ◽  
C Byrne ◽  
A Heise ◽  
P J McNally ◽  
...  
Keyword(s):  
Methyl Silsesquioxane ◽  
Porous Poly

Robust spin-on-glass poly(methyl)silsesquioxane-based low-k materials derived from a cyclic siloxane precursor

RSC Advances ◽  
2015 ◽  
Vol 5 (82) ◽  
pp. 66511-66517 ◽  
Author(s):  
Albert S. Lee ◽  
Sung Yeoun Oh ◽  
Seung-Sock Choi ◽  
He Seung Lee ◽  
Seung Sang Hwang ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Dielectric Constant ◽  
Low Dielectric Constant ◽  
Cyclic Siloxane ◽  
Low Dielectric ◽  
Methyl Silsesquioxane ◽  
Low K

Low dielectric constant poly(methyl)silsesquioxane spin-on-glass resins incorporating a cyclic precursor exhibited exceptional mechanical properties to withstand CMP processes.

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