high order correction
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scholarly journals High-order correction calculation for survival of Rydberg atoms in intense laser fields

2021 ◽  
Vol 22 ◽  
pp. 103594
Author(s):  
Jiajia Zha ◽  
Zhihao Qin ◽  
Jiayi Yan ◽  
Na Cao ◽  
Qi Wei ◽  
...  
Keyword(s):  
Rydberg Atoms ◽  
High Order ◽  
Order Correction ◽  
Intense Laser ◽  
High Order Correction ◽  
Intense Laser Fields ◽  
Laser Fields ◽  
Correction Calculation

Hybrid overlay metrology for high order correction by using CDSEM

2016 ◽  
Author(s):  
Philippe Leray ◽  
Sandip Halder ◽  
Gian Lorusso ◽  
Bart Baudemprez ◽  
Osamu Inoue ◽  
...  
Keyword(s):  
High Order ◽  
Order Correction ◽  
High Order Correction

FPGA-based real time controller for high order correction in EDIFISE

2012 ◽  
Author(s):  
L. F. Rodríguez-Ramos ◽  
H. Chulani ◽  
Y. Martín ◽  
T. Dorta ◽  
A. Alonso ◽  
...  
Keyword(s):  
Real Time ◽  
High Order ◽  
Order Correction ◽  
High Order Correction

Using intrafield high-order correction to achieve overlay requirement beyond sub-40nm node

2009 ◽  
Author(s):  
Chun Yen Huang ◽  
Chuei Fu Chue ◽  
An-Hsiung Liu ◽  
Wen Bin Wu ◽  
Chiang Lin Shih ◽  
...  
Keyword(s):  
High Order ◽  
Order Correction ◽  
High Order Correction

High order correction and sampling strategy for 45nm immersion lithography overlay control

2008 ◽  
Author(s):  
Bo Yun Hsueh ◽  
George K. C. Huang ◽  
Chun-Chi Yu ◽  
Jerry K. C. Hsu ◽  
Chin-Chou Kevin Huang ◽  
...  
Keyword(s):  
Sampling Strategy ◽  
High Order ◽  
Order Correction ◽  
High Order Correction ◽  
Immersion Lithography
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