Using intrafield high-order correction to achieve overlay requirement beyond sub-40nm node

2009 ◽  
Author(s):  
Chun Yen Huang ◽  
Chuei Fu Chue ◽  
An-Hsiung Liu ◽  
Wen Bin Wu ◽  
Chiang Lin Shih ◽  
...  
Keyword(s):  
High Order ◽  
Order Correction ◽  
High Order Correction

High order correction and sampling strategy for 45nm immersion lithography overlay control

2008 ◽  
Author(s):  
Bo Yun Hsueh ◽  
George K. C. Huang ◽  
Chun-Chi Yu ◽  
Jerry K. C. Hsu ◽  
Chin-Chou Kevin Huang ◽  
...  
Keyword(s):  
Sampling Strategy ◽  
High Order ◽  
Order Correction ◽  
High Order Correction ◽  
Immersion Lithography

scholarly journals High-order correction calculation for survival of Rydberg atoms in intense laser fields

2021 ◽  
Vol 22 ◽  
pp. 103594
Author(s):  
Jiajia Zha ◽  
Zhihao Qin ◽  
Jiayi Yan ◽  
Na Cao ◽  
Qi Wei ◽  
...  
Keyword(s):  
Rydberg Atoms ◽  
High Order ◽  
Order Correction ◽  
Intense Laser ◽  
High Order Correction ◽  
Intense Laser Fields ◽  
Laser Fields ◽  
Correction Calculation

Hybrid overlay metrology for high order correction by using CDSEM

2016 ◽  
Author(s):  
Philippe Leray ◽  
Sandip Halder ◽  
Gian Lorusso ◽  
Bart Baudemprez ◽  
Osamu Inoue ◽  
...  
Keyword(s):  
High Order ◽  
Order Correction ◽  
High Order Correction

FPGA-based real time controller for high order correction in EDIFISE

2012 ◽  
Author(s):  
L. F. Rodríguez-Ramos ◽  
H. Chulani ◽  
Y. Martín ◽  
T. Dorta ◽  
A. Alonso ◽  
...  
Keyword(s):  
Real Time ◽  
High Order ◽  
Order Correction ◽  
High Order Correction

Development of High-Order Scheme in Unstructured Mesh for Direct Numerical Simulations

2013 ◽  
Author(s):  
H. Q. Yang ◽  
Z. J. Chen ◽  
Jonathan G. Dudley
Keyword(s):  
Degrees Of Freedom ◽  
Unstructured Grids ◽  
Correction Method ◽  
Higher Order ◽  
High Order ◽  
Order Correction ◽  
High Order Accuracy ◽  
Order Accuracy ◽  
High Order Scheme ◽  
Upwind Schemes

There has been a growing interest in higher-order spatial discretization methods due to their potential for delivering high accuracy at reasonable computational overhead for the Direct Numerical Simulation (DNS) of vortex-dominated flows. Many of the existing high-order schemes for unstructured grids use more degrees-of-freedom (DOF) in each cell to achieve high-order accuracy. This paper formulates and demonstrates a high-order correction method for unstructured grids. Using this approach, there is no increase in DOF within each cell. By adding higher order correction terms, higher order accuracy can be achieved. The present technique is innovative in that it can be readily added to existing lower order solvers, it can achieve very high-order accuracy, it is stable, and it can make use of either central or upwind schemes. Many examples are presented and used to demonstrate the high-order accuracy.

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