Hydrogenated poly-crystalline silicon thin films deposited by inductively coupled plasma assisted pulsed dc twin magnetron sputtering

Su Yuan-Jun;  Xu Jun;  Zhu Ming;  Fan Peng-Hui;  Dong Chuang

doi:10.7498/aps.61.028104

Hydrogenated poly-crystalline silicon thin films deposited by inductively coupled plasma assisted pulsed dc twin magnetron sputtering

Acta Physica Sinica ◽

10.7498/aps.61.028104 ◽

2012 ◽

Vol 61 (2) ◽

pp. 028104

Author(s):

Su Yuan-Jun ◽

Xu Jun ◽

Zhu Ming ◽

Fan Peng-Hui ◽

Dong Chuang

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Inductively Coupled Plasma ◽

Crystalline Silicon ◽

Inductively Coupled ◽

Silicon Thin Films ◽

Pulsed Dc

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Growth of Highly -Oriented Crystalline Silicon Thin Films on Molybdenum by Pulsed dc Magnetron Sputtering

Solid State Phenomena ◽

10.4028/www.scientific.net/ssp.93.287 ◽

2003 ◽

Vol 93 ◽

pp. 287-294

Author(s):

P. Reinig ◽

F. Fenske ◽

A. Schöpke ◽

B. Selle ◽

W. Fuhs ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Crystalline Silicon ◽

Dc Magnetron Sputtering ◽

Silicon Thin Films ◽

Pulsed Dc ◽

Pulsed Dc Magnetron Sputtering

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Nano-crystalline silicon thin films grown by the inductively coupled plasma assisted CFUBM at low temperature

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2010.07.086 ◽

2010 ◽

Vol 205 ◽

pp. S227-S230 ◽

Cited By ~ 6

Author(s):

Kyung S. Shin ◽

Yoon S. Choi ◽

In S. Choi ◽

Y. Setsuhara ◽

Jeon G. Han

Keyword(s):

Thin Films ◽

Low Temperature ◽

Inductively Coupled Plasma ◽

Crystalline Silicon ◽

Inductively Coupled ◽

Silicon Thin Films ◽

Nano Crystalline

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Plasma-Enhanced Reactive Magnetron Sputtering Assisted with Inductively Coupled Plasma for Reactivity-Controlled Deposition of Microcrystalline Silicon Thin Films

Japanese Journal of Applied Physics ◽

10.7567/jjap.52.11nb05 ◽

2013 ◽

Vol 52 (11S) ◽

pp. 11NB05 ◽

Cited By ~ 4

Author(s):

Kosuke Takenaka ◽

Yuichi Setsuhara ◽

Akinori Ebe

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Inductively Coupled Plasma ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Microcrystalline Silicon ◽

Inductively Coupled ◽

Silicon Thin Films ◽

Controlled Deposition

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Study of sterilization-treatment in pure and N- doped carbon thin films synthesized by inductively coupled plasma assisted pulsed-DC magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2016.09.142 ◽

2017 ◽

Vol 392 ◽

pp. 1062-1067 ◽

Cited By ~ 10

Author(s):

Amjed Javid ◽

Manish Kumar ◽

Jeon Geon Han

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Inductively Coupled Plasma ◽

Dc Magnetron Sputtering ◽

Inductively Coupled ◽

Pulsed Dc ◽

Pulsed Dc Magnetron Sputtering ◽

Carbon Thin Films

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Crystalline silicon surface passivation by intrinsic silicon thin films deposited by low-frequency inductively coupled plasma

Journal of Applied Physics ◽

10.1063/1.4733701 ◽

2012 ◽

Vol 112 (1) ◽

pp. 013708 ◽

Cited By ~ 26

Author(s):

H. P. Zhou ◽

D. Y. Wei ◽

S. Xu ◽

S. Q. Xiao ◽

L. X. Xu ◽

...

Keyword(s):

Thin Films ◽

Inductively Coupled Plasma ◽

Silicon Surface ◽

Surface Passivation ◽

Crystalline Silicon ◽

Low Frequency ◽

Inductively Coupled ◽

Silicon Thin Films ◽

Silicon Surface Passivation

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Hydrogen plasma induced crystallization of Si thin films by remote inductively coupled plasma source assistant pulsed dc twin magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2011.10.042 ◽

2012 ◽

Vol 206 (14) ◽

pp. 3159-3164 ◽

Cited By ~ 1

Author(s):

Yuanjun Su ◽

Jun Xu ◽

Chuang Dong ◽

Wenqi Lu

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Inductively Coupled Plasma ◽

Hydrogen Plasma ◽

Plasma Source ◽

Inductively Coupled ◽

Pulsed Dc ◽

Induced Crystallization

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Device Relevant Doped Amorphous Silicon Thin Films by Inductively Coupled Plasma Enhanced Chemical Vapor Deposition

2018 IEEE 7th World Conference on Photovoltaic Energy Conversion (WCPEC) (A Joint Conference of 45th IEEE PVSC, 28th PVSEC & 34th EU PVSEC) ◽

10.1109/pvsc.2018.8548298 ◽

2018 ◽

Author(s):

Boon Heng TEO ◽

Jin LIU ◽

Jia GE ◽

Delio PEREZ ◽

Edwin CARMONA ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Amorphous Silicon ◽

Vapor Deposition ◽

Inductively Coupled Plasma ◽

Chemical Vapor ◽

Inductively Coupled ◽

Silicon Thin Films

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Effect of silane/hydrogen ratio on microcrystalline silicon thin films by remote inductively coupled plasma

Journal of Applied Physics ◽

10.1063/1.4807404 ◽

2013 ◽

Vol 113 (20) ◽

pp. 203505 ◽

Cited By ~ 5

Author(s):

Y. N. Guo ◽

D. Y. Wei ◽

S. Q. Xiao ◽

S. Y. Huang ◽

H. P. Zhou ◽

...

Keyword(s):

Thin Films ◽

Inductively Coupled Plasma ◽

Microcrystalline Silicon ◽

Inductively Coupled ◽

Silicon Thin Films

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Highly doped p-type nanocrystalline silicon thin films fabricated by low-frequency inductively coupled plasma without H2 dilution

Journal of Applied Physics ◽

10.1063/1.3642983 ◽

2011 ◽

Vol 110 (6) ◽

pp. 063302 ◽

Cited By ~ 7

Author(s):

W. S. Yan ◽

D. Y. Wei ◽

S. Xu ◽

H. P. Zhou

Keyword(s):

Thin Films ◽

Inductively Coupled Plasma ◽

Low Frequency ◽

Nanocrystalline Silicon ◽

Inductively Coupled ◽

Silicon Thin Films ◽

P Type

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Effects of substrate temperature on structural, optical and morphological properties of hydrogenated nanocrystalline silicon thin films prepared by inductively coupled plasma chemical vapor deposition

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-015-3426-0 ◽

2015 ◽

Vol 26 (10) ◽

pp. 7790-7796 ◽

Cited By ~ 2

Author(s):

Dingyu Yang ◽

Xinghua Zhu ◽

Hui Sun ◽

Xiuying Gao ◽

Xu Li

Keyword(s):

Thin Films ◽

Vapor Deposition ◽

Inductively Coupled Plasma ◽

Chemical Vapor ◽

Nanocrystalline Silicon ◽

Morphological Properties ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Inductively Coupled ◽

Silicon Thin Films

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