scholarly journals Crystalline silicon surface passivation by intrinsic silicon thin films deposited by low-frequency inductively coupled plasma

2012 ◽  
Vol 112 (1) ◽  
pp. 013708 ◽  
Author(s):  
H. P. Zhou ◽  
D. Y. Wei ◽  
S. Xu ◽  
S. Q. Xiao ◽  
L. X. Xu ◽  
...  
Keyword(s):  
Thin Films ◽  
Inductively Coupled Plasma ◽  
Silicon Surface ◽  
Surface Passivation ◽  
Crystalline Silicon ◽  
Low Frequency ◽  
Inductively Coupled ◽  
Silicon Thin Films ◽  
Silicon Surface Passivation

scholarly journals Crystalline silicon surface passivation by thermal ALD deposited Al doped ZnO thin films

AIP Advances ◽  
2017 ◽  
Vol 7 (3) ◽  
pp. 035219 ◽  
Author(s):  
Jagannath Panigrahi ◽  
Vandana ◽  
Rajbir Singh ◽  
C. M. S. Rauthan ◽  
P. K. Singh
Keyword(s):  
Thin Films ◽  
Silicon Surface ◽  
Surface Passivation ◽  
Crystalline Silicon ◽  
Zno Thin Films ◽  
Doped Zno ◽  
Silicon Surface Passivation

Effect of silane/hydrogen ratio on microcrystalline silicon thin films by remote inductively coupled plasma

2013 ◽  
Vol 113 (20) ◽  
pp. 203505 ◽  
Author(s):  
Y. N. Guo ◽  
D. Y. Wei ◽  
S. Q. Xiao ◽  
S. Y. Huang ◽  
H. P. Zhou ◽  
...  
Keyword(s):  
Thin Films ◽  
Inductively Coupled Plasma ◽  
Microcrystalline Silicon ◽  
Inductively Coupled ◽  
Silicon Thin Films
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