A two‐dimensional particle‐in‐cell simulation of an electron‐cyclotron‐resonance etching tool

K. A. Ashtiani; J. L. Shohet; W. N. G. Hitchon; G.‐H. Kim; N. Hershkowitz

doi:10.1063/1.360144

A two‐dimensional particle‐in‐cell simulation of an electron‐cyclotron‐resonance etching tool

Journal of Applied Physics ◽

10.1063/1.360144 ◽

1995 ◽

Vol 78 (4) ◽

pp. 2270-2278 ◽

Cited By ~ 9

Author(s):

K. A. Ashtiani ◽

J. L. Shohet ◽

W. N. G. Hitchon ◽

G.‐H. Kim ◽

N. Hershkowitz

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Two Dimensional ◽

Particle In Cell ◽

Cell Simulation

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Comparison of particle-in-cell simulation with experiment for the transport system of the superconducting electron cyclotron resonance ion source VENUS

Review of Scientific Instruments ◽

10.1063/1.2166677 ◽

2006 ◽

Vol 77 (3) ◽

pp. 03A338 ◽

Cited By ~ 6

Author(s):

D. S. Todd ◽

D. Leitner ◽

M. Leitner ◽

C. M. Lyneis ◽

J. Qiang ◽

...

Keyword(s):

Transport System ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Ion Source ◽

Electron Cyclotron ◽

Particle In Cell ◽

Cell Simulation

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The particle-in-cell simulation and Monte Carlo collision simulation of the interaction between electrons and microwave in electron cyclotron resonance discharge

Acta Physica Sinica ◽

10.7498/aps.58.5526 ◽

2009 ◽

Vol 58 (8) ◽

pp. 5526

Author(s):

Jin Xiao-Lin ◽

Huang Tao ◽

Liao Ping ◽

Yang Zhong-Hai

Keyword(s):

Monte Carlo ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Particle In Cell ◽

Cell Simulation

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Two-dimensional numerical model of electron cyclotron resonance discharge with pointwise mappings

Review of Scientific Instruments ◽

10.1063/1.2166429 ◽

2006 ◽

Vol 77 (3) ◽

pp. 03A345

Author(s):

V. Eruhimov ◽

V. Semenov

Keyword(s):

Numerical Model ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Two Dimensional

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Preparation of transparent Nb/two-dimensional electron gas contacts by using electron cyclotron resonance plasma cleaning

Journal of Applied Physics ◽

10.1063/1.1290256 ◽

2000 ◽

Vol 88 (7) ◽

pp. 4440 ◽

Cited By ~ 4

Author(s):

Th. Schäpers ◽

R. P. Müller ◽

G. Crecelius ◽

H. Hardtdegen ◽

H. Lüth

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Gas ◽

Electron Cyclotron ◽

Plasma Cleaning ◽

Two Dimensional ◽

Dimensional Electron ◽

Two Dimensional Electron Gas ◽

Dimensional Electron Gas ◽

Resonance Plasma

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Electrical Properties of AlGaAs/GaAs Two-Dimensional Electron Gases (2DEGs) Grown on GaAs Substrates Cleaned by an Electron Cyclotron Resonance (ECR) Hydrogen Plasma

Japanese Journal of Applied Physics ◽

10.1143/jjap.35.l1494 ◽

1996 ◽

Vol 35 (Part 2, No. 11B) ◽

pp. L1494-L1497 ◽

Cited By ~ 4

Author(s):

Naoto Kondo

Keyword(s):

Electrical Properties ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Hydrogen Plasma ◽

Electron Cyclotron ◽

Two Dimensional ◽

Dimensional Electron ◽

Electron Gases ◽

Gaas Substrates

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Two-dimensional simulation of an electron cyclotron resonance plasma source with power deposition and neutral gas depletion

Plasma Sources Science and Technology ◽

10.1088/0963-0252/11/3/306 ◽

2002 ◽

Vol 11 (3) ◽

pp. 260-265 ◽

Cited By ~ 5

Author(s):

Minghai Liu ◽

Xiwei Hu ◽

Guoyang Yu ◽

Qinchong Wu ◽

Yuan Pan

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Two Dimensional ◽

Electron Cyclotron Resonance Plasma ◽

Power Deposition ◽

Neutral Gas ◽

Dimensional Simulation ◽

Resonance Plasma

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Two-dimensional simulation of an electron cyclotron resonance discharge

IEEE Conference Record - Abstracts. 1999 IEEE International Conference on Plasma Science. 26th IEEE International Conference (Cat. No.99CH36297) ◽

10.1109/plasma.1999.829308 ◽

2003 ◽

Author(s):

J.H. Shiau ◽

J.H. Tsai ◽

S.H. Chen ◽

J.Y. Yang ◽

C.J. Chiou

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Two Dimensional ◽

Dimensional Simulation

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Linewidth anomaly of two-dimensional-electron cyclotron resonance in the extreme quantum limit

Physical Review B ◽

10.1103/physrevb.40.1716 ◽

1989 ◽

Vol 40 (3) ◽

pp. 1716-1719 ◽

Cited By ~ 8

Author(s):

C. T. Liu ◽

P. Mensz ◽

D. C. Tsui ◽

G. Weimann

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Quantum Limit ◽

Two Dimensional ◽

Dimensional Electron

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A two-dimensional simulation of electron cyclotron resonance plasma and comparison with experimental data

Thin Solid Films ◽

10.1016/s0040-6090(98)01513-2 ◽

1999 ◽

Vol 341 (1-2) ◽

pp. 18-21 ◽

Cited By ~ 3

Author(s):

Chee Burm Shin ◽

Jin Seok Hur ◽

Soo Ghee Oh

Keyword(s):

Experimental Data ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Two Dimensional ◽

Electron Cyclotron Resonance Plasma ◽

Dimensional Simulation ◽

Resonance Plasma ◽

Comparison With Experimental Data

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3D particle-in-cell simulations of electron magnetic confinement in electron cyclotron resonance ion sources

Review of Scientific Instruments ◽

10.1063/1.5127546 ◽

2020 ◽

Vol 91 (1) ◽

pp. 013302

Author(s):

Xiaolin Jin ◽

Li Lei ◽

Jibo Li ◽

Tao Huang ◽

Xiaoyan Zhang ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Magnetic Confinement ◽

Electron Cyclotron ◽

Ion Sources ◽

Particle In Cell

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